Microscanner Multi-Beam Laser Processing for Non-Periodic Patterns

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Solution Overview

Problem

Current laser processing technologies face challenges in efficiently and flexibly processing non-periodic or partially periodic patterns on workpieces, as existing multi-beam systems are limited to periodic structures, leading to inefficiencies in processing speed and control.

Innovation Solution

A laser processing device equipped with a beam splitting unit and an optical control unit featuring an array of reflective microscanners, allowing for the arbitrary selection and positioning of partial beams to achieve precise and flexible processing of multiple sites simultaneously, even in non-periodic patterns.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If existing multi-beam systems are used for periodic structures, then processing efficiency is improved, but flexibility for non-periodic patterns deteriorates

Engineering Contradiction:
Improveprocessing efficiencyVSAvoidflexibility for non-periodic patterns
Core Design Contradiction:
ProductivityVSAdaptability or versatility

Solution Approach 1:

The patent implements dynamic beam selection and positioning by allowing the optical control unit to arbitrarily select subsets of partial beams from the bundle and position them at different locations on the workpiece. This enables the system to adapt from fixed periodic patterns to flexible non-periodic patterns by dynamically reconfiguring which beams are active and where they are directed, resolving the contradiction between processing efficiency and pattern flexibility.

Inventive Principle:
Principle #15Dynamics

2Adaptability or versatility

If arbitrary selection of partial beams is implemented, then flexibility for non-periodic patterns is improved, but device complexity increases

Engineering Contradiction:
Improveflexibility for non-periodic patternsVSAvoidoptical control unit complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The optical control unit is designed as a universal device that can handle both periodic and non-periodic patterns using the same hardware infrastructure. The beam splitting unit generates a complete bundle of partial beams that can be arbitrarily selected and positioned, making the system multi-functional without requiring separate systems for different pattern types. This universality manages complexity by consolidating control functions rather than multiplying hardware for each pattern type.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Speed

If parallel processing of multiple sites is implemented, then processing speed is improved, but control complexity increases

Engineering Contradiction:
Improveprocessing speedVSAvoidcontrol complexity
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The laser beam is segmented into multiple partial beams that can be independently controlled and directed to different processing sites. The beam splitting unit divides the original beam into a bundle of partial beams, and the optical control unit selectively positions these segmented beams at multiple locations simultaneously. This segmentation enables parallel processing at multiple sites while managing control complexity through modular beam management rather than requiring a completely new control architecture.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables rapid and parallel processing of multiple sites on a workpiece with arbitrary spatial combinations, improving processing speed and flexibility by allowing individual positioning and movement of partial beams within their scanning regions, thus overcoming the limitations of traditional systems.

Implementation Method 1

a beam splitting unit, which is disposed downstream of the laser radiation source in the beam direction and is configured for splitting the laser beam into a bundle of partial beams

Methodology Applied
Scientific EffectDiffraction: Diffraction

Implementation Method 2

a beam splitting unit, which is disposed downstream of the laser radiation source in the beam direction and is configured for splitting the laser beam into a bundle of partial beams

Methodology Applied
Scientific EffectRefraction: Refraction

Implementation Method 3

an optical control unit, which is disposed downstream of the beam splitting unit in the beam direction and which comprises a reflective optical functional unit formed of an array of reflective microscanners

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 4

laser processing device and a method for laser-processing a workpiece at predetermined processing sites

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Implementation Method 5

laser processing device and a method for laser-processing a workpiece at predetermined processing sites

Methodology Applied
Scientific EffectAblation: Ablation

Data Source

PatentUS20230048420A1Laser processing device and method for laser-processing a workpiece
Publication Date: 2023.02.16 PULSAR PHOTONICS GMBH
  • US20230048420A1 patent drawing
  • US20230048420A1 patent drawing
  • US20230048420A1 patent drawing

AI summary

A laser-machining device comprising a laser-radiation source to generate a laser beam and emit it along an optical path; a beam-splitting unit downstream of the laser-radiation source designed to split the laser beam into a bundle of partial beams; an optical control unit downstream of the beam-splitting unit comprising a reflective optical functional unit formed by an array of reflective microscanners, wherein the optical control unit is designed to select any desired number of partial beams in any desired spatial combination from the bundle of partial beams and direct them onto a workpiece, and to position and/or move at least one of those partial beams within a specified partial-beam scanning region of the respective partial beam using the microscanner of the array of microscanners assigned to the respective partial beam, and methods for laser machining a workpiece.