Scanning Microscope Deflector Control for Exit Pupil Alignment

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Solution Overview

Problem

The position of the exit pupil in an imaging optical system and its conjugate position change, causing issues in scanning microscopes as the rotation center of the scanned light flux fails to follow these changes, leading to light loss and degradation in optical performance.

Innovation Solution

A scanning microscope design that includes a scan unit with first and second deflectors, and optionally third and fourth deflectors, which control the deflection angles to ensure the pivotal point of the scanned light flux coincides with the exit pupil or its conjugate position, using specific conditional expressions to adjust for changes in the exit pupil position, and includes a magnification changing optical system to maintain alignment with changes in magnification.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the exit pupil position changes depending on the type of objective lens or magnification changing optical system, then the scanning microscope can accommodate different lenses and magnifications, but the rotation center of the scanned light flux fails to follow these changes, causing light loss and degradation in optical performance

Engineering Contradiction:
Improveadaptability to different objective lenses and magnificationsVSAvoidoptical performance stability
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The patent applies the dynamics principle by making the deflection angles of the first and second deflectors variable and adjustable. The control unit dynamically adjusts these deflection angles based on the detected exit pupil position to ensure the rotation center follows the exit pupil position. This allows the system to adapt to different objective lenses and magnifications while maintaining stable optical performance, resolving the contradiction between adaptability and reliability.

Inventive Principle:
Principle #15Dynamics

2Device complexity

If fixed deflection angles are used in the deflectors, then the device structure is simple, but the rotation center of the scanned light flux cannot follow changes in exit pupil position, leading to light loss

Engineering Contradiction:
Improvedeflector control structureVSAvoidlight loss
Core Design Contradiction:
Device complexityVSLoss of energy

Solution Approach 1:

The patent implements feedback by using a detection unit to detect the exit pupil position and a control unit to adjust the deflection angles of the first and second deflectors based on this detection. This feedback mechanism ensures that the rotation center of the scanned light flux follows the exit pupil position, preventing light loss while maintaining relatively simple device structure through automated control.

Inventive Principle:
Principle #23Feedback

3Ease of operation

If the rotation center of the scanned light flux does not coincide with the exit pupil position, then the scanning mechanism is simple, but optical performance degrades due to light loss

Engineering Contradiction:
Improvescanning mechanism simplicityVSAvoidoptical performance
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The patent replaces complex mechanical adjustment mechanisms with an automated optical control system. Instead of mechanically adjusting the deflector positions to maintain alignment, the system uses a detection unit to detect exit pupil position and a control unit to adjust deflection angles electronically. This substitution maintains scanning mechanism simplicity while ensuring the rotation center coincides with the exit pupil position, preserving optical performance.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows the rotation center of the scanned light flux to move and follow the changed exit pupil position, maintaining optimal optical performance and preventing light loss across different magnification settings.

Implementation Method 1

a first deflector and a second deflector that scan the illumination light in a first direction in the two-dimensional scanning... The first deflector reflects the illumination light, and the second deflector further reflects the illumination light reflected off the first deflector

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentUS9551862B2Scanning microscope
Publication Date: 2017.01.24 NIKON CORP
  • US9551862B2 patent drawing
  • US9551862B2 patent drawing
  • US9551862B2 patent drawing

AI summary

There is provided a scanning microscope so configured that when the position of the exit pupil of an imaging optical system and a position conjugate to the exit pupil change, the position of the rotation center of a scanned light flux is moved and follows the changed exit pupil position. A scanning microscope includes a light source, an objective lens, and a scan unit. The scan unit includes first to fourth deflectors, and the deflection angle of illumination light deflected off each of the first to fourth deflectors is so controlled that the pivotal point of the illumination light deflected off each of the first and second deflectors and the pivotal point of the illumination light deflected off each of the third and fourth deflectors substantially coincide with the exit pupil of the objective lens or a position conjugate to the exit pupil.