Scanning Microscope Detector Oversampling via Optical Redirection

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional high-resolution scanning microscopes face challenges in detecting radiation at high resolution due to detector limitations, such as insufficient signal-to-noise ratios and space constraints, which restrict the integration of larger detector arrays without significant lens design complexities.

Innovation Solution

The method involves redistributing diffraction-limited radiation from the detection plane to a detector array with a different size and arrangement, using optical fibers or mirrors, allowing for oversampling of the diffraction structure without preserving the single image, enabling the use of larger or smaller detector arrays and reducing crosstalk between pixels.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a conventional detector array is used to detect the diffraction-limited single image, then the detector size and pixel arrangement are constrained, but this limits the ability to achieve high-resolution detection beyond the diffraction limit

Engineering Contradiction:
Improvelocation accuracyVSAvoiddetector array configuration flexibility
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The detection plane is segmented into multiple independently controllable beam positions, allowing the single image to be scanned across different detector elements. This segmentation enables oversampling of the diffraction structure by distributing detection across multiple pixels without requiring a physically large detector array

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A scanning mechanism acts as an intermediary between the static detector array and the diffraction-limited single image, enabling the image to be dynamically positioned across different detector elements. This intermediary scanning system allows flexible sampling patterns without physical reconfiguration of the detector

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If the single image is detected with multiple times more image information per point, then resolution beyond the diffraction limit is achieved, but the radiation intensity per pixel decreases significantly

Engineering Contradiction:
ImproveresolutionVSAvoidradiation intensity per pixel
Core Design Contradiction:
Measurement precisionVSIllumination intensity

Solution Approach 1:

The scanning mechanism pre-positions the single image across multiple detector elements in a predetermined oversampling pattern. By distributing the diffraction structure information across multiple pixels before detection, the system achieves high-resolution data collection while maintaining adequate signal levels through optimized sampling trajectories

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The single image is scanned periodically across the detector array in a systematic pattern, allowing multiple samples of the diffraction structure to be collected over time. This periodic scanning accumulates signal information while maintaining resolution through temporal integration of multiple passes

Inventive Principle:
Principle #19Periodic action

3Measurement precision

If a larger detector array is integrated to capture more image information, then detection resolution improves, but device complexity and lens design requirements increase significantly

Engineering Contradiction:
Improvedetection resolutionVSAvoidlens design complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

Instead of enlarging the detector array to capture more information, the invention inverts the approach by using a compact detector array with a scanning mechanism that brings the single image to different detector positions. This inversion maintains detector compactness while achieving equivalent or superior sampling through dynamic positioning

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The scanning mechanism provides multi-functionality by enabling a single compact detector array to perform the work of a much larger static array. The same detector elements can sample different regions of the diffraction structure at different times, achieving universal coverage without physical expansion

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables high-resolution microscopy beyond the diffraction limit with improved speed and complexity, allowing for increased resolution and accurate detection of radiation intensity, while minimizing crosstalk and accommodating various detector array geometries.

Implementation Method 1

The invention relates to a microscope for high resolution scanning microscopy of a sample, having an illumination device for the purpose of illuminating the sample, an imaging device for the purpose of scanning a point or linear spot across the sample and of imaging the point- or linear spot into a diffraction-limited, resting single image

Methodology Applied
Scientific EffectOptical fiber transmission: Optical Fibre

Implementation Method 2

imaging the point- or linear spot into a diffraction-limited, resting single image, with a reproduction scale in a detection plane

Methodology Applied
Scientific EffectDiffraction: Diffraction

Data Source

PatentUS11372223B2High-resolution scanning microscopy
Publication Date: 2022.06.28 CARL ZEISS MICROSCOPY GMBH
  • US11372223B2 patent drawing
  • US11372223B2 patent drawing
  • US11372223B2 patent drawing

AI summary

A microscope and method for high resolution scanning microscopy of a sample, having an illumination device, an imaging device for the purpose of scanning at least one point or linear spot across the sample and of imaging the point or linear spot into a diffraction-limited, static single image below a reproduction scale in a detection plane. A detector device is used for detecting the single image in the detection plane for various scan positions, with a location accuracy which, taking into account the reproduction scale in at least one dimension/measurement, is at least twice as high as a full width at half maximum of the diffraction-limited single image.