Charged Particle Microscope Dual Data Paths for Drift Compensation

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Solution Overview

Problem

Current charged particle microscopes face challenges in applications requiring real-time feedback and continuous tilt tomography field-of-view correction, with limitations in active image-based drift compensation and system state measurement methods, particularly in electron counting cameras.

Innovation Solution

A charged particle microscope with dual output interfaces: one for high-quality, reliable data stream and another for low-latency data stream, enabling real-time feedback and maintaining high image quality.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a single output interface is used for the charged particle camera, then device complexity is reduced, but real-time feedback capability and data reliability cannot be simultaneously satisfied

Engineering Contradiction:
Improvereal-time feedback capabilityVSAvoidoutput interface complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent divides the single output interface into two separate output interfaces: a first output interface optimized for high data reliability and a second output interface optimized for low latency real-time feedback. This segmentation allows each interface to be independently optimized for its specific function, resolving the contradiction between versatility and complexity.

Inventive Principle:
Principle #1Segmentation

2Reliability

If data processing is optimized for high reliability, then data quality is improved, but latency increases and real-time feedback is compromised

Engineering Contradiction:
Improvedata reliabilityVSAvoiddata latency
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The patent segments the data processing pipeline into two parallel paths: one path prioritizes data reliability with comprehensive processing and validation, while the other path prioritizes low latency with streamlined processing. This allows the system to deliver high-reliability data when needed while also providing real-time feedback capabilities.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

For the real-time feedback application, the system applies partial processing action - providing just enough data processing to achieve low latency while accepting that not all reliability checks are performed. This partial action satisfies the real-time requirement without compromising the overall system's ability to provide high-reliability data through the other interface.

Inventive Principle:
Principle #16Partial or excessive action

3Measurement precision

If electron counting algorithm is used for high-quality imaging, then image quality is improved, but processing time increases and real-time applications are limited

Engineering Contradiction:
Improveimage qualityVSAvoidprocessing speed
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent segments the electron counting processing into two modes: a full processing mode that applies the complete electron counting algorithm for high-quality imaging through the first output interface, and a streamlined mode that provides faster processing for real-time applications through the second output interface. This segmentation allows both high image quality and real-time processing capabilities to coexist.

Inventive Principle:
Principle #1Segmentation

Data Source

PatentEP4632789A1Charged particle microscope having a charged particle detector
Publication Date: 2025.10.15 FEI CO
  • EP4632789A1 patent drawingFigure 1
  • EP4632789A1 patent drawingFigure 2
  • EP4632789A1 patent drawingFigure 3

AI summary

A charged particle microscope that incorporates dual data stream output interfaces within its imaging system. These interfaces enable the microscope to capture and process data from the charged particle camera in two distinct ways, leading to enhanced imaging capabilities and improved flexibility. This invention has the potential to significantly advance the field of charged particle microscopy and find applications in various scientific and industrial settings.