Laser Scanning Microscope Height Profile Linking
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Solution Overview
Problem
Laser scanning microscopes face limitations in measuring large surface areas with high accuracy due to narrow measurement viewfields and the need for high magnification, which restricts the range that can be measured at once, and existing methods for linking height and intensity images of partitioned regions are inefficient.
Innovation Solution
A laser scanning microscope apparatus with a light deflecting unit, photo-detecting unit, Z scanning unit, and controlling unit that scans a sample independently, obtaining height information by maximizing intensity output, and an arithmetic processing unit that links multiple height profiles to generate continuous data, allowing for extended measurement lengths and improved data analysis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If high magnification is used to achieve high measurement accuracy, then measurement precision is improved, but the measurement viewfield becomes narrow
Solution Approach 1:
The patent divides the large measurement region into multiple small sub-regions that can be captured within the narrow viewfield of high-magnification objectives. By measuring each sub-region separately and then linking the measurements through overlapping areas, the system achieves both high measurement precision and large coverage area.
2Area of stationary object
If multiple partitioned regions are measured and linked to increase measurement viewfield, then measurement area is improved, but data handling complexity increases
Solution Approach 1:
The patent merges multiple height profiles from different sub-regions into a single continuous height profile by utilizing overlapping measurement areas. The linking process combines data from adjacent sub-regions while eliminating redundancy, thereby reducing overall data handling complexity compared to managing completely separate measurements.
Solution Approach 2:
The patent uses overlapping regions between adjacent sub-regions as intermediary zones for linking measurements. These overlapping areas serve as reference zones that facilitate the alignment and integration of height profiles from different sub-regions, simplifying the data processing workflow.
3Area of stationary object
If conventional linking methods are used to combine height profiles, then measurement coverage is improved, but measurement speed decreases
Solution Approach 1:
The patent performs preliminary measurements of multiple sub-regions simultaneously or in parallel where possible, and prepares height profiles for linkage in advance. By organizing measurement sequences and pre-processing data from overlapping regions before final integration, the system accelerates the overall measurement process while maintaining comprehensive coverage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables high-speed measurement of large surface areas with improved accuracy and reduced data handling requirements, comparable to stylus roughness meters, while maintaining compatibility and reducing memory needs, thus enhancing the cost-effectiveness and efficiency of the apparatus.
Implementation Method 1
an objective lens which gathers light from a laser light source on a sample to be examined
Implementation Method 2
a photo-detecting unit for detecting the amount of light that transmits an optical diaphragm arranged in a position conjugate to the focal position of the objective lens and is reflected from the sample to be examined
Implementation Method 3
a Z scanning unit for changing a relative distance, in the direction of the optical axis of the objective lens, between the sample to be examined and the objective lens
Implementation Method 4
a light deflecting unit that gathers light from a laser light source on a sample to be examined through an objective lens and can scan the sample to be examined independently in a surface direction with the laser light
Data Source
AI summary
A laser scanning microscope apparatus comprising, a controlling unit for obtaining height information at each scanning point of a sample to be examined by obtaining a relative distance that maximizes an intensity output from a photo-detecting unit, which is obtained when the sample to be examined is scanned with a light from a laser light source, when a relative distance is changed by a Z scanning unit, includes an arithmetic processing unit for obtaining a plurality of height profiles of one line acquired by scanning the sample to be examined in a state of light with the light defecting unit while shifting the plurality of height profiles of one line in a scanning direction by a predetermined amount, and for obtaining one profile by linking the plurality of height profiles.