Charged Particle Microscope Phase Identification via HSV Color Mapping
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Solution Overview
Problem
Current charged particle microscopy methods, such as SEM, face challenges in rapidly and accurately acquiring and processing spectral information for sample analysis, particularly with energy dispersive x-ray spectroscopy, which requires extensive post-processing and resource-intensive data combination.
Innovation Solution
A method utilizing a charged particle microscope that detects emissions of different types and assigns corresponding color hues in the HSV color space for real-time image representation, combining spectral and topological data to provide a colored image of the sample, allowing for efficient data processing and rapid information acquisition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If energy dispersive x-ray spectroscopy is used for material analysis, then measurement precision is improved, but loss of time increases due to extensive post-processing requirements
Solution Approach 1:
The patent applies preliminary action by pre-defining phase identification rules and spectral matching criteria before analysis begins. The system pre-processes reference spectral data and establishes decision trees for phase identification, so that during actual analysis, the system can rapidly compare sample spectra against pre-established patterns without requiring extensive post-processing computation.
Solution Approach 2:
The patent replaces traditional mechanical post-processing analysis with an automated computer-based system that uses algorithms to rapidly identify phases from spectral data. The control unit automatically processes spectral information, matches it against reference databases, and generates phase identification results without requiring manual intervention or extensive computational post-processing, thereby dramatically reducing analysis time while maintaining precision.
2Measurement precision
If extensive post-processing analysis is performed to combine EDS and SEM data, then measurement precision is improved, but productivity decreases due to resource consumption and time requirements
Solution Approach 1:
The patent merges EDS spectral data and SEM imaging data into a unified phase identification process. The control unit simultaneously processes both data types and integrates them to identify material phases, eliminating the need for separate post-processing steps. This integrated approach maintains the precision benefits of combining multiple data sources while significantly improving productivity by performing the combination operation in a single automated pass rather than through multiple sequential processing stages.
Solution Approach 2:
The patent changes the processing parameters by implementing real-time data acquisition and processing modes instead of traditional batch processing. The system adjusts acquisition parameters to collect sufficient spectral and imaging data during the scanning process itself, then uses optimized algorithms to rapidly process the data with reduced computational resources, thereby maintaining high identification accuracy while increasing overall analysis throughput.
3Measurement precision
If the electron beam dwells longer at each analysis point to accumulate sufficient x-ray counts, then measurement precision is improved, but loss of time increases
Solution Approach 1:
The patent applies partial action by acquiring spectral data at multiple progressively shorter dwell times. The system first performs a rapid preliminary scan with minimal dwell time to identify potential phases, then selectively applies longer dwell times only at locations where phase identification requires additional spectral confirmation. This approach ensures sufficient spectral quality for critical measurements while minimizing overall analysis time by avoiding excessive dwelling at all points.
Solution Approach 2:
The patent uses preliminary action by performing a rapid initial survey scan with short dwell times to identify regions of interest and potential phases before conducting detailed spectral analysis. This preliminary mapping allows the system to pre-position the beam and plan subsequent measurements, ensuring that extended dwell times are applied only where necessary for accurate phase identification, thereby optimizing the balance between spectral quality and total analysis time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables real-time, accurate, and efficient acquisition of sample information, reducing the time and resources needed for data processing and providing a meaningful, colored image representation of the sample's phases, enhancing the speed and accuracy of sample examination.
Implementation Method 1
Irradiation of a specimen by a scanning electron beam precipitates emanation of 'auxiliary' radiation from the specimen, in the form of secondary electrons
Implementation Method 2
backscattered electrons are detected by a solid state detector
Implementation Method 3
X-rays and cathodoluminescence (infrared, visible and/or ultraviolet photons)
Implementation Method 4
cathodoluminescence (infrared, visible and/or ultraviolet photons)
Implementation Method 5
each backscattered electron is amplified as it creates many electron-hole pairs in a semiconductor detector
Implementation Method 6
In a process called 'energy dispersive x-ray spectroscopy' or 'EDS', the energies of x-rays coming from the sample in response to the electron beam are measured and plotted in a histogram to form a material specific spectrum
Data Source
AI summary
The invention relates to a method of examining a sample using a charged particle microscope, comprising the steps of providing a charged particle beam, as well as a sample; scanning said charged particle beam over said sample; and detecting, using a first detector, emissions of a first type from the sample in response to the beam scanned over the sample. Spectral information of detected emissions of the first type is used for assigning a plurality of mutually different phases to said sample. In a further step, a corresponding plurality of different color hues—with reference to an HSV color space—are associated to said plurality of mutually different phases. Using a second detector, emissions of a second type from the sample in response to the beam scanned over the sample are detected. Finally an image representation of said sample is provided.