3D Microscope Illuminator with Insertable Imaging Modules

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Solution Overview

Problem

Conventional microscopes are limited to providing two-dimensional images, which is insufficient for capturing the three-dimensional nature of most samples.

Innovation Solution

A 3D microscope system that includes a microscope illuminator capable of generating 3D images, featuring a first and second light source, patterned articles, and beam-splitters, along with insertable components for various imaging and measurement capabilities such as Nomarski, polarized light, and interferometry.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If conventional microscopes are used, then simple 2D imaging is achieved, but 3D imaging capability is lost

Engineering Contradiction:

Improveimaging capabilityVSAvoid3D sample information

Core Design Contradiction:

Adaptability or versatilityVSLoss of information

Solution Approach 1:

The patent implements a dual light path configuration where a first light path provides conventional 2D illumination and a second light path with patterned articles provides structured illumination. By combining these paths through beam splitters, the system captures both 2D intensity information and 3D depth information, enabling true 3D imaging while maintaining backward compatibility with conventional microscopy.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Adaptability or versatility

If multiple imaging capabilities are integrated, then versatility is improved, but device complexity increases

Engineering Contradiction:

Improveimaging and measurement capabilitiesVSAvoidsystem structure

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent designs an illuminator that serves multiple functions: it provides conventional 2D illumination through the first light path, structured 3D illumination through the second light path with patterned articles, and supports various imaging modes (Nomarski, polarized light, interferometry) through insertable components. This multi-functional design consolidates what would otherwise require separate instruments into a single platform.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The system divides the illumination function into separate modular light paths (first light path for conventional illumination, second light path for structured illumination) that can be independently configured. Insertable components such as polarizer assemblies and quarter wave plates can be added or removed to switch between different imaging modes without redesigning the entire system.

Inventive Principle:

Principle #1Segmentation

3Measurement precision

If patterned articles and multiple light paths are added, then 3D imaging capability is improved, but light path complexity increases

Engineering Contradiction:

Improve3D measurement accuracyVSAvoidlight path configuration

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent introduces beam splitters as intermediary optical elements that combine the first light path and second light path. The beam splitters redirect light from both paths into a unified illumination path that passes through the objective lens, allowing complex structured illumination to be achieved without requiring separate complex imaging paths.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the capture of true-color 3D images and precise measurements of samples, overcoming the limitations of conventional 2D microscopy by integrating multiple imaging and measurement techniques into a single system.

Implementation Method 1

a first beam-splitter, a lens group, and a beam-splitter set

Methodology Applied

Scientific EffectLight reflection and transmission: Reflection

Implementation Method 2

The beam-splitter set can include a second beam-splitter and a pair of beam-splitters

Methodology Applied

Scientific EffectOptical beam splitting: Reflection

Implementation Method 3

The lens group can image the first light source and the second light source at an entrance pupil of a microscope objective lens

Methodology Applied

Scientific EffectOptical focusing: Lens

Implementation Method 4

The set of articles can include a plurality of patterned articles, and one of a through-hole and a pin-hole

Methodology Applied

Scientific EffectOptical modulation:

Implementation Method 5

One of the components can be a polarizer assembly including an adjustable polarizer

Methodology Applied

Scientific EffectLight polarization: Polarisation

Implementation Method 6

An assembly including a polarizer with a motorized rotator and a quarter wave plate

Methodology Applied

Scientific EffectWave plate polarization transformation:

Implementation Method 7

another of the components can be a wavelength filter assembly including a through-hole and a narrow band filter

Methodology Applied

Scientific EffectOptical filtering: Filter (optical)

Data Source

PatentUS12265212B23D microscope including insertable components to provide multiple imaging and measurement capabilities

Publication Date: 2025.04.01 KLA CORP

AI summary

A three-dimensional (3D) microscope includes various insertable components that facilitate multiple imaging and measurement capabilities. These capabilities include Nomarski imaging, polarized light imaging, quantitative differential interference contrast (q-DIC) imaging, motorized polarized light imaging, phase-shifting interferometry (PSI), and vertical-scanning interferometry (VSI).