Vacuum Carrier for Electron Microscope Manipulators
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Solution Overview
Problem
Existing nanomanipulation systems for scanning electron microscopes (SEM) require opening the high-vacuum specimen chamber to mount or demount manipulators and exchange end-effectors, leading to contamination and lengthy pump-down processes, limiting the efficiency and flexibility of sample manipulation.
Innovation Solution
A carrier device with a platform for securing and electrically connecting manipulators, allowing them to be transported into and out of the vacuum specimen chamber through the specimen exchange chamber, maintaining the vacuum integrity and enabling the use of multiple manipulators without disrupting the high-vacuum environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manipulators are mounted to the specimen exchange chamber or feedthrough, then manipulators can be installed inside the SEM, but the chamber must be opened for mounting/demounting which causes contamination and lengthy pump-down processes
Solution Approach 1:
The system divides the manipulator installation into two independent parts: a vacuum-tight carrier device that can be mounted to the specimen stage, and separate manipulator modules that attach to the carrier. This segmentation allows the carrier to remain sealed while manipulators are exchanged externally, eliminating contamination during manipulator installation.
Solution Approach 2:
The carrier device serves as an intermediary component between the vacuum chamber and the manipulators. It provides a vacuum-tight interface that allows manipulators to be mounted and demounted outside the chamber while maintaining vacuum integrity, thus preventing contamination during manipulator exchange.
2Adaptability or versatility
If the specimen chamber is opened for manipulator exchange, then manipulators can be replaced, but the vacuum must be broken requiring lengthy pump-down processes
Solution Approach 1:
The system separates the manipulator exchange function from the vacuum chamber, allowing manipulators to be exchanged on the carrier device outside the vacuum environment. This enables rapid manipulator replacement without breaking vacuum, significantly reducing vacuum recovery time.
Solution Approach 2:
The carrier device is pre-mounted to the specimen stage with vacuum-tight seals before manipulator installation. This preliminary setup allows manipulators to be exchanged externally without affecting the vacuum, enabling rapid manipulation of different samples or tools.
3Adaptability or versatility
If multiple manipulators are mounted onto a platform fastened to the specimen stage, then multiple manipulators can collaborate, but the platform occupies space and may interfere with regular imaging
Solution Approach 1:
The carrier device serves multiple functions: it acts as a mounting platform for multiple manipulators, provides vacuum-tight sealing, enables external manipulator exchange, and interfaces with the specimen stage. This multi-functionality reduces the need for separate specialized components, simplifying the overall system structure.
Data Source
AI summary
The present invention relates to a carrier device for transporting one or more manipulators into a vacuum specimen chamber of an electron microscope, characterized in that the carrier device comprises: (i) a platform having securing means for detachably securing the one or more manipulators to the platform, and (ii) electrical connectors secured to the platform for the electrical connection of the one or more manipulators. The present invention also relates to a method for transporting the carrier device into the vacuum specimen chamber of the electron microscope without altering the vacuum of the vacuum specimen chamber comprising transporting the carrier device of the invention through the specimen exchange chamber of the electron microscope and into the vacuum specimen chamber.