Microscope System Merging SEM and TEM for Crystal Structure Visualization
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Solution Overview
Problem
Conventional scanning electron microscopes (SEM) cannot visualize the crystal structure of a sample at both the sample structure and crystal structure levels without transferring the sample to a transmission electron microscope, leading to sample deterioration and damage during transfer.
Innovation Solution
A method and microscope system that change a zoom parameter to direct a charged particle beam to sample locations for sample structure visualization and an electron beam for diffraction pattern detection, allowing simultaneous visualization of sample and crystal structure levels within a single device.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a scanning electron microscope is used to obtain SEM images, then sample structure level visualization is achieved, but crystal structure level visualization cannot be obtained
Solution Approach 1:
The patent combines SEM and TEM functionalities into a single microscope system. The microscope includes both an SEM column for obtaining sample structure images and a TEM column for obtaining crystal structure images, allowing both visualization capabilities to coexist and operate on the same sample without transfer.
Solution Approach 2:
The microscope system is designed as a universal platform that can perform multiple functions: it can operate as an SEM for sample structure visualization, as a TEM for crystal structure visualization, and can switch between these modes. The system universally handles both types of analysis within a single device.
2Measurement precision
If the sample is transferred from SEM to TEM to determine crystal structure, then crystal structure visualization is achieved, but sample deterioration and damage occur
Solution Approach 1:
By merging SEM and TEM into a single microscope system, the patent eliminates the need for sample transfer between instruments. The sample remains in one location throughout the analysis process, preventing deterioration and damage that would occur during transfer operations.
Solution Approach 2:
The system is configured to obtain SEM images first to identify regions of interest at the sample structure level, then uses the same coordinate system to guide TEM analysis for crystal structure determination. This preliminary positioning action ensures the sample is not moved or damaged while maintaining the ability to perform both types of analysis.
3Measurement precision
If the zoom parameter is increased to resolve crystal structure, then spatial resolution is improved, but the charged particle beam system cannot achieve sufficient resolution
Solution Approach 1:
The system dynamically switches between different beam systems based on the required zoom parameter and resolution level. For lower magnifications, the charged particle beam system is used, while for high magnifications requiring crystal structure resolution, the electron beam system is activated. This dynamic adaptation allows the system to meet varying resolution requirements.
Solution Approach 2:
The patent changes the beam type parameter based on the analysis requirements. The system can switch between charged particle beams (ions) and electron beams, adjusting the beam parameters according to the zoom level and desired resolution, enabling the system to achieve sufficient resolution at all magnification levels.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables visualization of both sample and crystal structures at different magnification levels using a single device, reducing sample damage and transfer-related issues, while maintaining high spatial resolution.
Implementation Method 1
directing a charged particle beam to first locations of the portion of the sample based on the zoom parameter using a charged particle beam system, detecting intensities representing amounts of particles incident onto a detection area during the directing of the charged particle beam
Implementation Method 2
directing an electron beam to second locations of the portion of the sample based on the zoom parameter using a scanning electron microscope, detecting diffraction patterns generated during the directing of the electron beam to the second locations
Implementation Method 3
the spatial resolution of the images obtainable using a SEM depends on the size of the spot formed by the electron beam on the sample, which in turn depends on the wavelength of the electrons of the electron beam
Data Source
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Figure 3A~3C
AI summary
Method of generating a zoom sequence visualizing a portion of a sample, the method comprising: (S1) changing a zoom parameter representing a magnification of an image of a portion of a sample; (S3) directing a charged particle beam to first locations of the portion based on the zoom parameter using a charged particle beam system; (S4) detecting intensities representing amounts of particles incident onto a detection area; (S4) visualizing a representation of the portion based on the intensities; (S6) directing an electron beam to second locations of the portion based on the zoom parameter using a scanning electron microscope; (S7) detecting diffraction patterns; (S8) determining crystallographic properties of a crystal structure of the portion based on the diffraction patterns; (S9) generating a representation of the crystal structure of the portion of the sample based on the determined crystallographic properties; (S10) visualizing the representation of the crystal structure in the image.