Microscope Objective Assembly Crash Detection

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Solution Overview

Problem

Microscopes in probe systems often experience collisions with devices under test (DUT) or other components, leading to potential damage due to high optical magnification and tight tolerances.

Innovation Solution

The implementation of an objective assembly crash detection system, which includes an orientation detection circuit with contacting structures in the objective assembly and mount, allows for rapid detection of collisions by monitoring changes in relative orientation between the objective assembly and the microscope body.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the microscope or objective assembly moves closely with tight tolerances to achieve high optical magnification, then measurement precision and imaging quality are improved, but the risk of collision with DUT or probe components increases

Engineering Contradiction:
Improveoptical magnification precisionVSAvoidcollision damage risk
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The orientation detection circuit monitors the relative orientation between the objective assembly and microscope body before a collision can occur. By detecting orientation changes in advance, the system can preemptively stop motion or retract components, preventing collision damage while maintaining the ability to operate with tight tolerances for high magnification.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The orientation detection circuit provides real-time feedback on the relative orientation of the objective assembly. This feedback loop allows the control system to continuously monitor position and orientation, making adjustments to prevent collisions while maintaining precise positioning for high-quality imaging.

Inventive Principle:
Principle #23Feedback

2Measurement precision

If the objective assembly is designed with fixed rigid mounting to maintain precise orientation, then measurement precision is improved, but the ability to mitigate collision impact is reduced

Engineering Contradiction:
Improveobjective alignment precisionVSAvoidcollision impact resistance
Core Design Contradiction:
Measurement precisionVSStrength

Solution Approach 1:

The system transitions from a purely rigid fixed mounting to a dynamic configuration where the objective assembly can pivot relative to the microscope body. The orientation detection circuit monitors this dynamic movement, allowing the system to maintain precise alignment during normal operation while accommodating impact forces during collisions by allowing controlled pivoting motion.

Inventive Principle:
Principle #15Dynamics

3Productivity

If the microscope operates with high speed and tight tolerances for efficient probing, then productivity is improved, but the likelihood and severity of collisions increase

Engineering Contradiction:
Improveprobing efficiencyVSAvoidcollision damage
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

The orientation detection circuit provides real-time feedback during high-speed probing operations, enabling the control system to detect orientation changes that indicate potential collisions. This allows for rapid response to prevent damage while maintaining high-speed operation for productivity.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

By monitoring orientation in real-time, the system can take preliminary action to stop motion or retract components before a collision occurs during high-speed probing, preventing damage while maintaining efficient operation during normal conditions.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentEP3918401B1Microscopes with objective assembly crash detection and methods of utilizing the same
Publication Date: 2025.03.05 FORMFACTOR INC
  • EP3918401B1 patent drawingFigure 1
  • EP3918401B1 patent drawingFigure 2
  • EP3918401B1 patent drawingFigure 3

AI summary

Microscopes with objective assembly crash detection and methods of utilizing the same are disclosed herein. For example, a microscope comprises a microscope body, an objective assembly comprising an objective lens, an objective assembly mount configured to separably attach the objective assembly to the microscope body, and an orientation detection circuit configured to indicate when a relative orientation between the microscope body and the objective assembly differs from a predetermined relative orientation.