Electron Microscope Sample Tracking for Large Drift Correction

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Solution Overview

Problem

Existing electron microscopy systems lack an efficient method for automating feature tracking and drift correction, especially in "in-situ" or "operando" studies where sample movements are significant and beyond the capabilities of common cameras and detectors.

Innovation Solution

A control system configured for sample tracking in an electron microscope environment, comprising a memory, a processor, and a microscope control component, which registers movement associated with a region of interest and adjusts the electron microscope control component to dynamically center and focus the view, incorporating magnitude and direction elements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If digital field of view shifting is used to correct sample movements, then image sharpness is improved, but the method is inadequate for significant movements beyond camera/detector capabilities

Engineering Contradiction:
Improveimage sharpnessVSAvoidcapability to handle significant sample movements
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The patent introduces an automated control system as an intermediary between the sample stage and the camera/detector. This control system continuously monitors sample position and automatically adjusts stage coordinates to compensate for movements, extending the correction capability beyond what digital field of view shifting alone can achieve. The control system acts as a mediator that coordinates between mechanical stage adjustment and digital image processing.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The system implements self-service through automated feedback control where the microscope system automatically detects and corrects its own drift and movement issues without external intervention. The control system continuously monitors sample position and autonomously adjusts stage coordinates, allowing the system to self-correct for significant movements that would otherwise require manual intervention or would exceed digital shifting capabilities.

Inventive Principle:
Principle #25Self-service

2Loss of information

If manual tracking of region of interest is performed, then measurement registration is possible, but automation extent is insufficient for comprehensive parameter tracking

Engineering Contradiction:
Improveparameter measurement registrationVSAvoidautomated feature tracking
Core Design Contradiction:
Loss of informationVSExtent of automation

Solution Approach 1:

The patent implements feedback control by continuously monitoring the position of regions of interest and automatically adjusting stage coordinates to maintain proper registration. The system detects deviations from expected positions and feeds this information back to the stage control, which automatically compensates for movements. This closed-loop feedback mechanism enables comprehensive automated tracking of multiple parameters including position, focus, and environmental conditions.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system replaces manual mechanical tracking operations with automated electronic control. Instead of manually adjusting stage coordinates and recording parameters, the patent uses an automated control system that electronically monitors sample position, calculates required corrections, and automatically adjusts stage coordinates. This substitution of manual mechanical operations with automated electronic control enables comprehensive parameter tracking that would be impractical to perform manually.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Stability of the object's composition

If automated control system dynamically adjusts microscope parameters, then image stability is improved, but device complexity increases

Engineering Contradiction:
Improveimage stabilityVSAvoidcontrol system complexity
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The patent implements a universal control system that performs multiple functions through a single integrated platform. The automated control system not only tracks and corrects sample position drift but also manages stage coordinate registration, monitors focus conditions, and coordinates with environmental control systems. By consolidating these diverse functions into one multi-functional system, the patent reduces overall device complexity compared to having separate specialized systems for each function.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The system merges previously separate control functions into a unified automated control architecture. The patent combines drift correction, feature tracking, stage coordinate management, and parameter registration into a single integrated control system. This merging of functions reduces the number of independent control loops and interfaces, thereby simplifying the overall system architecture while maintaining comprehensive image stability control.

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentUS12284445B2Automated application of drift correction to sample studied under electron microscope
Publication Date: 2025.04.22 PROTOCHIPS INC
  • US12284445B2 patent drawing
  • US12284445B2 patent drawing
  • US12284445B2 patent drawing

AI summary

Methods and systems for calibrating a transmission electron microscope are disclosed. A fiducial mark on the sample holder is used to identify known reference points so that a current collection area and a through-hole on the sample holder can be located. A plurality of beam current and beam area measurements are taken, and calibration tables are extrapolated from the measurements for a full range of microscope parameters. The calibration tables are then used to determine electron dose of a sample during an experiment at a given configuration.