Scanning Microscope Stage Position Sensor
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Solution Overview
Problem
Conventional scanning microscopes face errors due to non-straightness of stage travel, which complicates image stitching and overlay, especially in high-data-rate applications, and require costly and complex systems for correction.
Innovation Solution
A scanning microscope with a position sensor and controller that adapts the probing system to compensate for transverse position and orientation errors without physically moving the stage, allowing for faster, simpler, and more cost-efficient operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional scanning microscope systems are used to compensate for stage travel non-straightness, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The patent replaces complex mechanical correction systems with an optical measurement system. Instead of using multiple actuators and mechanical stages to physically correct for non-straightness, the invention uses an optical element and photosensor to detect stage position and orientation, then compensates through electronic adaptation of the probing system parameters.
Solution Approach 2:
The patent introduces an optical element as an intermediary between the stage and the probing system. This optical element, combined with the photosensor, serves as a mediator that translates physical stage deviations into measurable signals, enabling precision correction without direct mechanical intervention.
2Manufacturing precision
If post-image processing is used to correct errors, then manufacturing precision is improved, but loss of time increases
Solution Approach 1:
The patent performs error compensation in real-time during the scanning process rather than as a post-processing step. The controller continuously adapts the probing system parameters based on real-time position and orientation data, eliminating the need for time-consuming post-image processing while maintaining high precision.
Solution Approach 2:
The patent implements a feedback loop where the photosensor continuously monitors stage position and orientation, and the controller uses this information to dynamically adjust the probing system parameters. This real-time feedback mechanism ensures accurate image formation without requiring subsequent correction processing.
3Reliability
If conventional correction systems are implemented, then reliability is improved, but ease of operation worsens
Solution Approach 1:
The patent enables the scanning microscope system to automatically compensate for its own errors without requiring complex external correction systems. The integrated position sensor and controller work together to self-correct for stage non-straightness, simplifying operation while maintaining high reliability through automated real-time adaptation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables accurate image formation with reduced residual errors, improving data throughput and reducing the need for intensive post-processing, while maintaining high precision and efficiency.
Implementation Method 1
a position sensor for measuring the transverse position of the stage and/or the orientation of the stage
Data Source
Figure 1
Figure 2
Figure 3~4
AI summary
A scanning microscope (10) comprises a stage (18) for holding a sample (20), a scan mechanism, a probing system for probing a region (24) of the sample (20), a position sensor (80, 82), and a controller. The scan mechanism is designed for translating the stage (18) between at least two axial positions. The probing system 10 comprises an optical element and a photosensor having a readout region, wherein the readout region extends in a direction (14), which is transverse to an ideal orientation (72) of the stage (18). The position sensor (80, 82) serves for measuring a transverse position (84, 86) of the stage (18) and/or of an orientation (74) of the stage (18). The controller (30) serves for adapting the probing system as a function of the measured 15 transverse position (84, 86) and/or the measured orientation (74).