Microscope Stage with 2D Scale for Z-Axis Positioning
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Solution Overview
Problem
Current microscope systems lack the accuracy to manage and reproduce the position of a stage surface in the optical axis direction, particularly in pathological diagnosis, where precise alignment and tilt correction are essential for accurate observation and comparison of morphological and functional images.
Innovation Solution
The microscope system incorporates a ΔZ stage for accurate Z-direction positioning, a ΔΘ stage for rotational and tilt correction, and a XY stage with two-dimensional scales and sensors for direct coordinate measurement, enabling precise management of the observation position in three-dimensional space with a target accuracy of ±0.1 µm in the X, Y, and Z directions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a conventional XY stage and Z stage are used without tilt correction, then the microscope system is simple in structure, but the position management accuracy in the optical axis direction deteriorates due to tilt and rotational errors
Solution Approach 1:
The stage is divided into multiple independent components: XY stage for planar movement, Z stage for vertical movement, and a separate tilt correction mechanism. This segmentation allows each component to perform its specific function with optimized precision without requiring the entire stage structure to be overly complex.
Solution Approach 2:
A tilt correction mechanism acts as an intermediary between the XY stage and the observation system. This intermediary component specifically addresses tilt and rotational errors without complicating the fundamental XY and Z stage structures, thereby improving position management accuracy while maintaining relative structural simplicity.
2Measurement precision
If tilt correction mechanisms are added to correct XY plane tilt, then position management accuracy improves, but device complexity increases
Solution Approach 1:
The tilt correction mechanism performs preliminary adjustment of the XY plane orientation before the main observation and measurement processes. By correcting tilt and rotational errors in advance, the system achieves high position management accuracy without requiring complex real-time compensation during observation.
3Measurement precision
If high-precision scales and sensors are implemented for direct coordinate measurement, then position reproduction accuracy reaches ±0.1 µm, but manufacturing precision requirements and device complexity increase
Solution Approach 1:
High-precision scales and sensors provide continuous feedback on the actual positions of the XY stage and Z stage. This feedback enables real-time correction and accurate reproduction of observation positions with ±0.1 µm precision, while the systematic integration of these measurement components manages the manufacturing precision requirements through coordinated calibration procedures.
Data Source
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AI summary
A microscope system includes a microscope body, a camera connected to an observation optical system of the microscope body, and an XY stage on which a slide of an observation object is placed and which is configured to move in an X-axis direction and a Y-axis direction that are orthogonal to each other. The XY stage includes an XY two-dimensional scale plate. The XY two-dimensional scale plate includes a first mark configured to provide X-axis direction axis information and Y-axis direction axis information of the stage, and a second mark which is provided within an observable region of the camera on the same plane as the first mark and which is available for recognizing a position of an XY plane of the first mark in a Z-axis direction at each of a plurality of points by focus detection of the camera.