Measurement Microscope Wide Field Accuracy

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Solution Overview

Problem

Existing measurement microscope devices face a trade-off between achieving a wide visual field and maintaining measurement accuracy, with current methods often resulting in decreased accuracy when trying to capture a wide visual field, and requiring extensive time for image capture due to limitations in illumination direction and object properties.

Innovation Solution

A measurement microscope device configuration that includes multiple measurement light projecting units, an observation illumination light source, and an imaging unit to capture striped images, allowing for the generation of a connected image with high accuracy and a wide visual field by adjusting imaging conditions and displaying measurement error regions, enabling the combination of multiple images to form a composite image while minimizing measurement errors.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If a wide visual field is captured by a single image, then the coverage area is improved, but the measurement accuracy deteriorates due to resolution loss

Engineering Contradiction:
Improvevisual field rangeVSAvoidmeasurement accuracy
Core Design Contradiction:
Area of stationary objectVSMeasurement precision

Solution Approach 1:

The patent divides the wide visual field into multiple sub-regions and captures them as separate images. Each sub-region image maintains high resolution and measurement accuracy, while the combination of multiple images provides comprehensive wide-area coverage. This segmentation approach resolves the contradiction by sacrificing single-image completeness for multi-image precision.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from a two-dimensional single-image approach to a three-dimensional multi-image dataset by adding the dimension of multiple capture positions. By capturing images from different positions and combining them, the system achieves both wide visual field coverage and high measurement accuracy that cannot be obtained from a single image.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Area of stationary object

If multiple images are captured to achieve wide visual field, then the coverage is improved, but the measurement time increases

Engineering Contradiction:
Improvevisual field rangeVSAvoidmeasurement time
Core Design Contradiction:
Area of stationary objectVSLoss of time

Solution Approach 1:

The patent performs preliminary actions by pre-planning the capture positions and paths before actual measurement. The control unit automatically determines optimal capture positions and guides the imaging device through predetermined paths, eliminating time-consuming manual positioning and setup during the actual measurement process.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system implements self-service through automatic image matching and connection. The control unit automatically matches overlapping regions between adjacent images and connects them into a comprehensive wide-area image without requiring manual intervention, significantly reducing the time needed for post-processing multiple captured images.

Inventive Principle:
Principle #25Self-service

3Productivity

If single-side illumination is used, then the measurement speed is improved, but the measurement completeness deteriorates for uneven surfaces

Engineering Contradiction:
Improvemeasurement speedVSAvoidmeasurement completeness
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent employs asymmetric multi-directional illumination by capturing images from both left and right sides of the object. This asymmetric approach ensures that uneven surfaces and protrusions are illuminated from multiple angles, eliminating shadowed regions that would occur with single-side illumination and ensuring complete measurement coverage.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The patent merges images captured under different illumination conditions (left-side and right-side illumination) into a single comprehensive measurement result. By combining these multiple illumination perspectives, the system achieves complete surface coverage while maintaining efficient measurement speed through automated processing.

Inventive Principle:
Principle #5Merging (Combining)

4Ease of operation

If standard measurement mode is used, then the measurement process is simplified, but the measurement reliability deteriorates for objects with penetration or multiple reflection

Engineering Contradiction:
Improvemeasurement simplicityVSAvoidmeasurement success rate
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The patent implements dynamic measurement mode selection that adapts to different object characteristics. The system automatically determines the appropriate measurement mode (single-side or both-side illumination) based on object properties such as transparency and reflectivity, ensuring reliable measurement results while maintaining operational simplicity through automated decision-making.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes measurement parameters dynamically based on object properties. By detecting object characteristics such as transparency and surface reflectivity, the system adjusts illumination directions, capture positions, and processing algorithms to optimize measurement reliability for each specific object type while keeping the user interface simple and unified.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution allows for high-accuracy imaging with a wide visual field, reducing measurement time and improving the reliability of measurements by adjusting imaging conditions and displaying error regions, thus overcoming the limitations of previous methods.

Implementation Method 1

a measurement light projecting unit for projecting measurement light as predetermined pattern structured illumination to the object from an oblique direction

Methodology Applied
Scientific EffectLight reflection: Reflection

Implementation Method 2

A distance d between the point O and the point A in an X-direction is measured, and based on this distance d, a height h of the point A on the surface of the object S is calculated

Methodology Applied
Scientific EffectTriangulation:

Data Source

PatentUS9291450B2Measurement microscope device, image generating method, measurement microscope device operation program, and computer-readable recording medium
Publication Date: 2016.03.22 KEYENCE CORP
  • US9291450B2 patent drawing
  • US9291450B2 patent drawing
  • US9291450B2 patent drawing

AI summary

An image with a wide visual field can be captured without causing deterioration in measurement accuracy. There are provided: a stage on which an object is placed; a display unit for displaying a height image or an observation image; a measurement unit for performing measurement on the height image; an image connecting unit configured to, by moving the stage and capturing a different region, acquire a plurality of height images, and connect the obtained plurality of height images and observation images to generate a connected image; a measurement error region display unit configured to superimpose and display a measurement error region, on an image of the object; and a measurement-image imaging condition setting unit for adjusting an imaging condition for a striped image required for generation of the height image to reduce the measurement error region.