Microscopic Measurement Apparatus Optical Axis Steering
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Solution Overview
Problem
Microscopic-measurement apparatuses face challenges in rapidly setting measuring areas and achieving accurate measurements due to the accumulation of errors from stage movements, especially when using electrically-controlled stages with low precision, which are unsuitable for rapid scanning.
Innovation Solution
A microscopic-measurement apparatus that allows for rapid setting of measuring areas by moving the measuring optical axis on the sample surface, featuring an observation-image display section, optical-axis display section, area setting section, and optical-information acquisition section, enabling precise measurements without relying on the stage drive system or its precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the stage is moved to position multiple measuring areas during mapping measurement, then optical information can be acquired from multiple areas, but errors accumulate due to stage movements requiring extremely high precision
Solution Approach 1:
The patent replaces the mechanical stage movement system with an optical axis movement system. Instead of moving the heavy stage to different positions for each measuring area, the invention moves the optical axis (via mirrors or beam steering) to illuminate different areas on the stationary sample. This substitution eliminates mechanical positioning errors and enables rapid area switching without requiring high-precision stage driving mechanisms.
Solution Approach 2:
The patent introduces an optical intermediary (scanning mirrors or beam steering mechanism) between the light source and the sample. This intermediary enables the optical axis to be moved independently of the stage position, allowing rapid switching between measuring areas through optical deflection rather than mechanical stage movement. The intermediary decouples the positioning function from the heavy stage mechanism.
2Stability of the object's composition
If a heavy stage is used to maintain stability during measurement, then measurement stability is improved, but rapid scanning becomes difficult due to the stage's weight
Solution Approach 1:
The patent substitutes the heavy mechanical stage movement with a lightweight optical axis movement system. The stage remains stationary and stable, while the optical axis is redirected to different areas using mirrors or beam steering. This replacement eliminates the inertia problem of heavy stages, enabling rapid scanning without compromising measurement stability since the stage itself does not need to move.
Solution Approach 2:
The patent separates the positioning function into two independent components: the stationary stage that provides stable support, and the movable optical axis that enables area selection. This segmentation allows the heavy stage to remain stable while the lightweight optical system performs rapid scanning, dividing the functions of stability and speed into separate subsystems.
3Loss of information
If integrated measurement data is acquired from every minute portion of a large measuring area, then comprehensive optical information is obtained, but measurement time increases significantly
Solution Approach 1:
The patent implements continuous optical axis scanning across multiple measuring areas without interrupting the measurement process. The optical axis moves continuously from one area to the next, and the system accumulates data from all areas in a single continuous operation. This eliminates the need to reposition the stage between areas, maintaining continuous useful action and significantly reducing total measurement time while acquiring comprehensive optical information from all areas.
Data Source
AI summary
A microscopic-measurement apparatus capable of conducting measurement successively in several set areas regardless of the type of stage driving system or the precision of the stage driving system. The microscopic-measurement apparatus for acquiring optical information from desired portions of a sample by moving a measuring optical axis on a surface of the sample includes an observation-image display section for displaying a sample surface image as an observation image, in a range of visual field which is observable at a present sample position; an optical-axis display section for displaying areas to be measured and a present position of the measuring optical axis in an overlapped state with the observation image; an area setting section capable of setting measuring areas by expanding, reducing, changing in shape and moving the areas to be measured; and an optical-information acquisition section for measuring one set measuring area or several set measuring areas successively with an instruction of starting measurement.