Microscopy Beam Alignment Using Diffraction and Drift Feedback

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Solution Overview

Problem

Charged particle microscopy faces challenges in aligning and synchronizing pulsed laser beams with electron beams due to target drift, expansion, and heating, leading to prolonged experimental times, increased target damage, and reduced image resolution.

Innovation Solution

Utilize the Debye-Waller effect to analyze diffraction patterns for target alignment, employing machine learning algorithms to swiftly align pulsed laser and electron beams, and utilize the period between light beam pulses to monitor and correct for target drift, thereby reducing experimental time and damage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If beam chopping methods are used to address relaxation time properties and saturation effects, then the photoemitter performance is improved, but synchronization challenges between pump and probe sources increase

Engineering Contradiction:
Improvephotoemitter performanceVSAvoidsynchronization complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent replaces mechanical beam chopping methods with a virtual synchronization approach using software-based timing control and coordinate transformation algorithms. This substitutes physical mechanical switching with computational methods to achieve picosecond-level synchronization between pump and probe beams without mechanical complexity

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the approach from physical beam manipulation to parameter-based control by adjusting timing parameters, coordinate systems, and synchronization offsets through software. This allows precise control of pump-probe timing relationships without mechanical components

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If conventional alignment methods are used to align laser and electron beams, then beam alignment is achieved, but target drift and expansion cause prolonged experimental times

Engineering Contradiction:
Improvebeam alignment precisionVSAvoidexperimental time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent performs preliminary alignment by pre-establishing coordinate transformations and alignment parameters before the main experiment. The system pre-calculates and stores transformation matrices that account for expected target drift, allowing rapid compensation during experimentation without time-consuming real-time adjustments

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent implements feedback mechanisms by continuously monitoring beam alignment and target position, then using real-time coordinate transformations to compensate for drift. The system measures alignment deviations and automatically adjusts beam positions through calculated transformations, maintaining precision without prolonged experimental interruptions

Inventive Principle:
Principle #23Feedback

3Measurement precision

If continuous beam exposure is used to maintain image quality, then image resolution is maintained, but target damage increases

Engineering Contradiction:
Improveimage resolutionVSAvoidtarget damage
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent employs periodic pulsed beam exposure instead of continuous illumination. By delivering beams in synchronized pulses with appropriate timing and intensity, the system maintains sufficient signal for high-resolution imaging while allowing target recovery between pulses, thereby reducing cumulative damage

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The patent maintains continuous useful action through synchronized pulsed delivery of pump and probe beams. The system ensures that during the brief pulse durations when beams are active, high-quality data is collected, while the periodic off periods allow target recovery, effectively maintaining imaging capability without continuous damage accumulation

Inventive Principle:
Principle #20Continuity of useful action

4Loss of time

If picosecond-level synchronization is implemented between pump and probe sources, then temporal resolution is improved, but device complexity and difficulty of synchronization increase

Engineering Contradiction:
Improvetemporal resolutionVSAvoidsynchronization system complexity
Core Design Contradiction:
Loss of timeVSDevice complexity

Solution Approach 1:

The patent replaces complex mechanical synchronization systems with software-based timing control and coordinate transformation methods. By using computational algorithms to manage picosecond-level timing relationships between pump and probe sources, the system achieves high temporal resolution without the complexity of precision mechanical synchronization hardware

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent achieves picosecond synchronization by precisely controlling timing parameters through software rather than mechanical means. The system adjusts timing offsets, pulse durations, and synchronization phases as configurable parameters, simplifying the synchronization system while maintaining picosecond-level temporal resolution

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances alignment precision, reduces experimental time, minimizes target damage, and improves image resolution by accurately determining target cooling rates and beam positions.

Implementation Method 1

determining a diffraction pattern resulting from an interaction of the charged particle beam with the target

Methodology Applied
Scientific EffectDiffraction: Diffraction

Implementation Method 2

Utilize the Debye-Waller effect to analyze diffraction patterns for target alignment

Methodology Applied
Scientific EffectDebye-Waller effect:

Data Source

PatentUS20250349503A1Beam alignment and synchronization in microscopy
Publication Date: 2025.11.13 FEI CO
  • US20250349503A1 patent drawing
  • US20250349503A1 patent drawing
  • US20250349503A1 patent drawing

AI summary

A method for aligning a pulsed laser beam in microscopy may include directing a first pulsed photon beam toward a target, directing a charged particle beam towards the target, determining a diffraction pattern resulting from an interaction of the charged particle beam with the target, directing a second pulsed photon beam towards the target, and determining a deviation of the diffraction pattern based at least in part on the second pulsed photon beam. In some embodiments, the method may include controlling, based at least in part on the deviation, a direction of pulsed photon emission by a light source, directing a third pulsed photon beam toward the target, generating detector data based at least in part on charged particles that result from a second interaction with the target and the third pulsed photon beam, and determining a position of the third pulsed photon beam, relative to the charged particle beam using the detector data.