Microscopy Sample Holder Materials for Thermal Drift Reduction

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Microscopy systems experience significant thermal drift due to temperature variations between the sample holder and detectors, leading to inefficient image alignment and prolonged settling times, which is particularly problematic in systems used for micro or nano structure fabrication and machining.

Innovation Solution

Implement a sample holder with a low thermal conductivity material, such as Zerodur, and a high emissivity component with a coating to manage heat exchange, reducing thermal drift by controlling radiative heat flow.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If cooled detectors are deployed close to the sample holder to improve detection capability, then signal-to-noise ratio is improved, but thermal drift occurs causing image alignment disturbance

Engineering Contradiction:
Improvedetection capabilityVSAvoidimage alignment
Core Design Contradiction:
Measurement precisionVSManufacturing precision

Solution Approach 1:

A thermal shield is introduced as an intermediary component between the cooled detector and the sample holder. This shield intercepts radiative heat flow from the sample holder, preventing it from reaching the detector. The shield is thermally connected to the detector stage, allowing it to passively absorb and redirect heat away from the detection path while maintaining detector cooling. This resolves the contradiction by enabling close detector placement for improved detection without causing thermal drift in the sample holder.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Manufacturing precision

If detectors are retracted to minimize thermal interference, then thermal drift is reduced, but detection efficiency decreases

Engineering Contradiction:
Improveimage stabilityVSAvoiddetection efficiency
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The thermal shield acts as a mediator that allows detectors to remain in the deployed position for high detection efficiency while preventing thermal interference. By placing the shield between the sample holder and detector, the system maintains optimal detection geometry without requiring detector retraction, thus preserving both image stability and detection efficiency simultaneously.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Manufacturing precision

If the sample holder is allowed to reach thermal equilibrium with the vacuum chamber, then thermal stability is improved, but settling time increases reducing system efficiency

Engineering Contradiction:
Improvethermal stabilityVSAvoidsettling time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The thermal shield is pre-cooled to detector temperature before detector deployment. This preliminary thermal preparation creates a pre-conditioned thermal pathway that accelerates the thermal equilibrium process. By having the shield already at the appropriate temperature, the system reduces the thermal mass that needs to be equilibrated when the detector is deployed, thereby reducing settling time while maintaining thermal stability.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Reduces image drift by up to 100% and enhances imaging efficiency by minimizing thermal equilibration time, improving the precision and speed of microscopy systems.

Implementation Method 1

a sample holder with a low thermal conductivity material for reducing a drift of the sample holder

Methodology Applied
Scientific EffectThermal insulation: Thermal Insulation

Implementation Method 2

a high emissivity component with a coating to manage heat exchange, reducing thermal drift by controlling radiative heat flow

Methodology Applied
Scientific EffectThermal radiation: Thermal Radiation

Data Source

PatentUS12512293B2Reduction of image drift in a microscopy system
Publication Date: 2025.12.30 FEI CO
  • US12512293B2 patent drawing
  • US12512293B2 patent drawing
  • US12512293B2 patent drawing

AI summary

The invention relates to a sample holder for a microscopy system comprising a material with a low thermal conductivity for reducing a drift of the sample holder when inserted into a microscope. The invention also relates to a cold trap for a microscopy system comprising a sample holder, wherein the cold trap comprises a coating with a high thermal emissivity to increase a heat load between the sample holder and the cold trap. The invention also relates to a microscopy system comprising a first element configured to have a first temperature, a second element configured to have a second temperature, and a third element configured to have a third temperature, wherein the third element is configured to be located at a plurality of different distances from the first element, wherein the microscopy system is configured to image a sample and to reduce a drift of the image.