Charged Particle Microscopy Segmentation for Faster Element Mapping
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Solution Overview
Problem
Current charged particle microscopy methods face challenges in rapidly and accurately acquiring spectral information for sample analysis, often requiring dense spectra that are time-consuming to collect, leading to compromised spatial resolution and inaccurate chemical characterization.
Innovation Solution
A method that involves scanning a charged particle beam over a sample, detecting spectral emissions, and using base spectral number values to determine the size of segments for each chemical element, allowing for variable spatial resolution based on element concentration and enabling accurate representation of both major and trace elements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If dense spectra are collected to ensure accurate chemical characterization, then measurement precision is improved, but loss of time increases significantly
Solution Approach 1:
The patent segments the data acquisition process by collecting spectral data at multiple dwell times (e.g., 1μs, 10μs, 100μs) and processing them in stages. This allows rapid initial assessment with coarse dwell times followed by targeted refinement only where needed, rather than uniformly collecting dense spectra across all pixels.
Solution Approach 2:
The patent applies partial action by collecting sufficient spectral data only for pixels where chemical characterization is actually needed, rather than uniformly collecting dense spectra across the entire image. The system identifies regions of interest and concentrates measurement resources there, performing fewer measurements in areas where rapid overview is sufficient.
2Measurement precision
If the beam dwells longer at each analysis point to record sufficient x-ray counts, then measurement precision is improved, but productivity decreases
Solution Approach 1:
The patent implements dynamic dwell time adjustment where the beam residence time at each pixel is adapted based on local requirements. Pixels with sufficient signal quality use shorter dwell times, while pixels requiring better spectral resolution use longer dwell times. This dynamic adaptation maintains measurement precision where needed while maximizing overall analysis speed.
Solution Approach 2:
The system changes the dwell time parameter dynamically across different pixels and during different stages of analysis. Initial rapid scanning uses short dwell times, followed by selective extension of dwell times only for pixels requiring enhanced spectral detail, thereby optimizing the trade-off between precision and productivity.
3Measurement precision
If counts from several close pixels are binned together to improve chemical accuracy, then measurement precision is improved, but manufacturing precision (spatial resolution) deteriorates
Solution Approach 1:
The patent applies local quality by allowing different binning strategies for different regions of the image. In regions with homogeneous composition, pixels are binned together to improve statistical accuracy. In regions with sharp compositional boundaries or fine features, binning is minimized or avoided to preserve spatial resolution. Each local region receives a customized binning treatment appropriate to its characteristics.
4Productivity
If the electron beam scans rapidly across the sample to improve productivity, then loss of time is reduced, but measurement precision of spectral emissions deteriorates
Solution Approach 1:
The patent employs periodic scanning with multiple passes at different dwell times. A first rapid pass collects preliminary spectral data at short dwell times for quick overview. Subsequent passes revisit specific regions with extended dwell times to refine spectral measurements where needed, creating a periodic measurement cycle that balances speed and precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables more rapid and accurate acquisition of information about the sample, allowing for high-resolution representation of elements with variable concentrations and improving the display of trace elements, while optimizing spatial resolution for each element present.
Implementation Method 1
Irradiation of a sample by a scanning electron beam precipitates emanation of 'auxiliary' radiation from the sample, in the form of secondary electrons
Implementation Method 2
backscattered electrons
Implementation Method 3
X-rays
Implementation Method 4
cathodoluminescence (infrared, visible and/or ultraviolet photons)
Implementation Method 5
each backscattered electron is amplified as it creates many electron-hole pairs in a semiconductor detector
Data Source
AI summary
A method of examining a sample using a charged particle microscope is provided comprising scanning a charged particle beam over an area of the sample, detecting spectral emissions from the sample in response to scanning of the charged particle beam, and identifying a first plurality of substantially similar spectral emissions. A first chemical element is determined that is associated with the substantially similar spectral emissions. A first base spectral number value associated with said first chemical element is provided that is related to the number of similar spectral emissions that are required for confidently determining said first chemical element. The first base spectral number value is used for dividing at least a part of the scanned area of the sample into a first number of segments. The method includes providing a graphical representation of the sample, wherein said graphical representation includes said first chemical element and corresponding segments.