Thermal Drift Correction in Microscopy via Predictive Modeling

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Solution Overview

Problem

Charged particle beam microscopy systems face significant challenges in maintaining image stability due to thermal drift, which affects the resolution and efficiency of imaging processes, particularly in environments where mechanical instability and thermal expansion are prevalent.

Innovation Solution

A method involving a thermal model and artificial intelligence-based approaches to predict and compensate for thermal drift by analyzing heat flow and thermal properties within the microscopy system, using sensors to measure temperature and other properties, and adjusting the sample position accordingly to minimize image drift.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If thermal drift correction is not implemented, then the system structure remains simple and operation is straightforward, but image resolution and stability deteriorate significantly

Engineering Contradiction:
Improveimage resolutionVSAvoidsystem complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The thermal model predicts thermal drift behavior in advance based on operating conditions and historical data. By calculating expected drift amounts before imaging begins, the system can pre-compensate for thermal effects, maintaining high resolution without requiring complex real-time correction hardware

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system creates a virtual thermal model that replicates the thermal behavior of the physical microscope components. This digital twin allows prediction and correction of thermal drift through software calculations rather than physical intervention, reducing hardware complexity while maintaining precision

Inventive Principle:
Principle #26Copying

2Productivity

If thermal drift correction is not implemented, then the setup and operation remain simple, but the time required to achieve stable imaging increases significantly

Engineering Contradiction:
Improveimaging efficiencyVSAvoidsettling time
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The thermal model predicts drift behavior in advance, allowing the system to proactively adjust for thermal effects before they impact imaging. This eliminates the need to wait for thermal stabilization, significantly reducing settling time and improving imaging efficiency

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system continuously monitors thermal conditions and compares actual drift with model predictions. This feedback loop allows real-time adjustments to compensate for thermal drift, maintaining stable imaging conditions without requiring extended settling periods

Inventive Principle:
Principle #23Feedback

3Device complexity

If software-based thermal drift correction is used, then hardware complexity is reduced, but computational requirements and processing time increase

Engineering Contradiction:
Improvehardware complexityVSAvoidcomputational energy
Core Design Contradiction:
Device complexityVSUse of energy by moving object

Solution Approach 1:

The thermal model focuses on predicting only the critical thermal drift parameters that affect imaging resolution, rather than modeling every aspect of the system. This selective approach reduces computational requirements while maintaining correction effectiveness

Inventive Principle:
Principle #16Partial or excessive action

Solution Approach 2:

The system uses simplified thermal models with adjusted parameters that capture essential drift behavior without requiring full-featured thermal simulations. By optimizing model parameters for the specific microscope configuration, computational energy consumption is reduced while maintaining correction accuracy

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method effectively reduces thermal drift, improving the stability and efficiency of imaging processes in charged particle beam microscopy systems by accurately predicting and compensating for thermal changes, thereby enhancing resolution and reducing the time required to achieve stable imaging.

Implementation Method 1

thermal expansion and contraction of different components of the microscope (that may be called a thermal drift)

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentEP4199030A1Thermal drift correction based on thermal modeling
Publication Date: 2023.06.21 FEI CO
  • EP4199030A1 patent drawingFigure 1
  • EP4199030A1 patent drawingFigure 2a~2c
  • EP4199030A1 patent drawingFigure 2d

AI summary

The present invention relates to a method to reduce drift of a sample and/or its image in a microscopy system, wherein the method comprises determining an expected thermal drift of the sample, and compensating for the drift of the sample and/or its image based upon the expected thermal drift. The present invention also relates to a corresponding microscopy system and a computer program product to perform the method according to the present invention.