Microspectroscope Linear Scanning for High-Speed Mapping

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Solution Overview

Problem

Conventional microspectroscopes face challenges in performing high-speed, high-sensitivity, and high-resolution mapping measurements over wide regions due to the need for stepwise sample scanning and prolonged exposure times, which result in increased measurement time and reduced signal-to-noise ratio.

Innovation Solution

A microspectroscope configuration that enables continuous scanning with a linear irradiation light, forming a spectral image with high spatial and wavelength resolution, allowing for the collection of average spectral data across a wide range without the need for stepwise movements, thereby reducing measurement time and maintaining high sensitivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional point analysis is performed for each measurement point, then high spatial resolution is achieved, but measurement time becomes excessively long

Engineering Contradiction:
Improvespatial resolutionVSAvoidmeasurement time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The invention divides the measurement process into two distinct modes: a scanning section that performs rapid low-resolution scanning to locate regions of interest, and a high-resolution analysis section that performs detailed spectroscopic analysis only on selected regions. This segmentation allows the system to achieve high spatial resolution where needed while maintaining fast overall measurement speed by avoiding exhaustive high-resolution scanning of the entire sample area.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention implements dynamic adjustment of measurement resolution and scanning speed based on the sample characteristics and measurement requirements. The system automatically transitions between rapid scanning mode and high-resolution analysis mode, optimizing the balance between measurement speed and spatial resolution dynamically during the measurement process rather than using a fixed approach.

Inventive Principle:
Principle #15Dynamics

2Productivity

If exposure time per point is shortened to reduce measurement time, then signal-to-noise ratio deteriorates

Engineering Contradiction:
Improvemeasurement speedVSAvoidsignal-to-noise ratio
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The measurement process is segmented into a rapid scanning phase with short exposure times for locating regions of interest, followed by a high-resolution analysis phase with longer exposure times for obtaining high S/N spectra. This allows the system to maintain fast overall measurement speed while ensuring sufficient exposure time for high-quality spectral data in the analysis phase.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system performs preliminary rapid scanning to identify and locate regions of interest before performing the actual high-resolution spectroscopic analysis. This preliminary action allows the system to pre-select measurement points that require detailed analysis, ensuring that sufficient exposure time is allocated only to those critical regions, thereby maintaining both measurement speed and signal-to-noise ratio.

Inventive Principle:
Principle #10Preliminary action

3Productivity

If line mapping is performed with stepwise sample scanning, then spectra of multiple points are obtained collectively, but measurement time increases due to repeated acceleration and deceleration

Engineering Contradiction:
Improveefficiency of area analysisVSAvoidtime for stage movement
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The invention implements continuous scanning without stepwise stopping and starting. The sample stage moves continuously through the measurement region while the laser beam scans across the sample surface, eliminating the repeated acceleration and deceleration cycles inherent in conventional stepwise scanning. This dynamic continuous scanning approach significantly reduces measurement time while maintaining the ability to collect spectra from multiple points.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system maintains continuous scanning motion throughout the measurement process, ensuring that the laser beam continuously irradiates different regions of the sample without interruption. This continuous action eliminates idle time associated with stopping and restarting the stage, thereby improving measurement efficiency and reducing total measurement time while still obtaining collective spectral data from multiple measurement points.

Inventive Principle:
Principle #20Continuity of useful action

4Productivity

If high performance stage is used to control stage at high speed and accurately, then measurement time is reduced, but device complexity and cost increase

Engineering Contradiction:
Improvemeasurement speedVSAvoidstage performance requirements
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The measurement system is segmented into two functional sections with different performance requirements: a scanning section that requires high-speed but lower precision stage movement for rapid coverage, and an analysis section that requires higher precision but can operate at slower speeds for detailed spectroscopic measurement. This segmentation allows the use of a standard-stage performance system rather than requiring high-performance stages throughout, thereby reducing device complexity and cost while maintaining fast measurement capability.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration significantly shortens measurement time, maintains high detection sensitivity, and achieves high spatial and wavelength resolution, making it suitable for rapid and accurate wide-range mapping measurements.

Implementation Method 1

irradiates laser light S2 onto a sample S through an objective lens S32, thereby obtaining Raman scattered light S2b

Methodology Applied
Scientific EffectRaman scattering: Scattering

Implementation Method 2

an imaging lens S34, which forms an image of the linear irradiation region on the light detection unit S60

Methodology Applied
Scientific EffectOptical imaging: Lens

Implementation Method 3

a spectrometer S50, which separates Raman scattered light S2b into spectral components and makes the separated light incident on the light detection unit S60

Methodology Applied
Scientific EffectSpectroscopy: Diffraction Grating

Data Source

PatentEP3276336B1microspectroscope
Publication Date: 2022.12.07 JASCO CORP
  • EP3276336B1 patent drawingFigure 1(A)~1(D)
  • EP3276336B1 patent drawingFigure 2
  • EP3276336B1 patent drawingFigure 3

AI summary

Provided is a microspectroscope capable of performing a wide range of mapping measurements with high detection sensitivity, at high speed, and with high wavelength resolution. A Raman spectroscopy device that comprises: a means that linearly irradiates excitation light; a movable stage for samples; an objective lens that condenses Raman light from the linear irradiation area; an entrance slit provided at an image formation position for the Raman light; a spectrometer that disperses light that has passed through the entrance slit; a CCD detector that detects Raman spectral images; and a control device that synchronizes the movable stage and the CCD detector and controls mapping measurement. The control means is configured so as to: control the movable stage and move the linear irradiation area in a direction orthogonal to the longitudinal direction; and execute a CCD detector cycle during stage movement, so as to obtain one average spectrum for the movement range of the linear irradiation area in one optical detection cycle.