Microstructured Vacuum Support Surface for Flat Substrate Exposure
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Solution Overview
Problem
Conventional vacuum substrate holders cause undesirable compression and bending of substrates with low rigidity and lead to intensity variations in light transmission, resulting in unacceptable 'coloring effects' during manufacturing of micro- and nanostructured devices.
Innovation Solution
A component with a base body featuring a close-meshed arrangement of micro- or nanostructures and trenches with a statistical distribution, allowing for planar vacuum suction without substrate deformation and homogeneous exposure, where the trenches provide the vacuum and the microstructures form a flat support surface to minimize light interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional vacuum grooves are used, then vacuum suction is achieved, but substrate compression and bending occur
Solution Approach 1:
The continuous vacuum groove is segmented into discrete micro- or nanostructures (pins, pillars, or posts) arranged in an array. This segmentation distributes the vacuum suction force across multiple discrete contact points rather than a continuous groove, preventing the substrate from bending or compressing while maintaining reliable vacuum holding capability.
Solution Approach 2:
The micro- or nanostructures are designed with specific local geometries (diameter, height, spacing) optimized for vacuum suction, while the spaces between them maintain substrate flatness. Each local region has tailored properties: the microstructures provide vacuum grip, while the inter-structure regions preserve substrate shape.
2Shape
If narrow vacuum grooves are used, then substrate deformation is reduced, but light transmission homogeneity deteriorates
Solution Approach 1:
The dimensions of the micro- or nanostructures (diameter, height, spacing) are carefully controlled within specific parameter ranges. These parameters are optimized to balance two competing requirements: small enough dimensions to maintain substrate flatness, yet configured to minimize light scattering and interference effects that would cause non-uniform illumination.
Solution Approach 2:
The micro- or nanostructures may employ asymmetric geometries or arrangements that optimize both vacuum suction and light transmission. For example, tapered shapes or specific orientation patterns can reduce light scattering while maintaining vacuum grip, resolving the contradiction between substrate flatness and illumination homogeneity.
3Shape
If sandblasted surface is used, then planar vacuum and homogeneous exposure are achieved, but surface roughness increases
Solution Approach 1:
Instead of using a sandblasted rough surface, the invention employs precisely fabricated micro- or nanostructures with controlled geometries. This segmentation approach achieves planar vacuum contact and homogeneous light exposure through ordered atomic-layer deposition or other precision manufacturing methods, avoiding the uncontrolled surface roughness inherent in sandblasting.
Solution Approach 2:
The mechanical sandblasting process is replaced with precision manufacturing techniques such as atomic layer deposition (ALD) or focused ion beam (FIB) milling. These methods provide atomic-level control over surface topology, achieving the desired flatness and homogeneity without the roughness introduced by stochastic mechanical processes like sandblasting.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures secure holding of substrates without bending and provides homogeneous exposure by avoiding compression and light interference, maintaining the initial flatness of the substrate and preventing 'coloring effects' during manufacturing processes.
Implementation Method 1
to which a vacuum can be applied
Implementation Method 2
a surface which has micro- or nanostructures which form a substantially flat support surface
Implementation Method 3
Owing to their statistical distribution, any interfering scattering effects and/or incoherent superposition effects when light passes through the component are avoided
Data Source
Figure 1~2
Figure 3
Figure 4~9
AI summary
The invention relates to a component (32) for manufacturing micro- and/or nanostructured devices, having a base body (33) and a surface (34) which has micro- or nanostructures (48) which form a substantially flat support surface (52) and between which trenches (54) extend with a statistical distribution, to which a vacuum can be applied. The invention further relates to a method of manufacturing such a component.