Electromechanical Microsystem With Deformable Membrane For Actuation
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Solution Overview
Problem
Current electromechanical microsystems have insufficient performance in terms of movement amplitude, force, accuracy, energy consumption, and frequency capacity, failing to provide a satisfactory combination of these parameters for actuation and sensing applications.
Innovation Solution
An electromechanical microsystem comprising a moveable transducer with a deformable membrane and cavity, where the membrane engages with an external member through a pin, allowing for adjustable movement and pressure-induced deformation, enabling long-travel actuation or sensing capabilities with reduced energy consumption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of moving object
If conventional microsystems are used for actuation, then the device structure is simple, but the movement amplitude and force are insufficient
Solution Approach 1:
The patent employs a deformable membrane that acts as a flexible diaphragm separating two pressure zones. By applying differential pressure across the membrane, large displacement amplitudes are achieved without requiring complex mechanical linkages. The membrane's elasticity allows it to convert pressure differences into significant movement while maintaining structural integrity and generating adequate force for actuation.
Solution Approach 2:
The system utilizes changes in pressure parameters to control membrane deformation. By dynamically adjusting the pressure differential across the membrane, the system achieves variable movement amplitudes and forces. This parameter-based control enables the microsystem to adapt its actuation characteristics without mechanical reconfiguration.
2Measurement precision
If conventional microsystems are used for sensing, then the device complexity is low, but the movement capturing capacity over significant amplitude is limited
Solution Approach 1:
The deformable membrane serves dual functionality as both actuator and sensor element. When used for sensing, the membrane's flexibility allows it to capture large amplitude movements by deforming in response to external forces. The membrane's elastic properties enable it to return to its original position, providing repeatable measurement capability over significant displacement ranges.
Solution Approach 2:
The same deformable membrane structure is utilized for both actuation and sensing applications. For actuation, pressure differences drive membrane deformation to produce movement. For sensing, external movements cause membrane deformation that can be measured. This multi-functional approach eliminates the need for separate actuator and sensor components, reducing overall system complexity while maintaining high measurement precision over large amplitude ranges.
3Length of moving object
If microsystems operate with high movement amplitude, then the actuation effectiveness is improved, but the energy consumption increases
Solution Approach 1:
The membrane-based system enables periodic actuation cycles where the membrane is deformed and then returns to its equilibrium position. This periodic action allows the system to achieve high movement amplitudes during active phases while consuming minimal energy during passive recovery phases. The elastic energy stored in the deformed membrane is released during the return stroke, reducing the energy required for each complete actuation cycle.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The microsystem achieves improved performance in movement amplitude, force, and frequency capacity while maintaining compatibility with targeted applications, with the ability to move or capture movements over significant distances and amplitudes, and operates efficiently with reduced energy consumption.
Implementation Method 1
At least one part of the deformable membrane forms at least one part of a first wall taken from among said walls of the cavity. The cavity is configured to hermetically contain a deformable medium specific to preserving a substantially constant volume under the action of an external pressure change exerted on the deformable medium through one of the walls of the cavity.
Implementation Method 2
at least one electromechanical transducer comprising a part which is moveable between a non-urged balanced position, and an urged non-balanced position
Data Source
AI summary
The invention relates to an electromechanical microsystem comprising an electromechanical transducer, a deformable membrane and a cavity hermetically containing a deformable medium, preserving a constant volume under the action of an external pressure change. The deformable membrane forms a wall of the cavity and has at least one free zone being deformed. The electromechanical transducer is configured, such that its movement is a function of said external pressure change, and conversely. The free zone engages with an external member, such that its deformation induces, or is induced by, a movement of the external member. The electromechanical microsystem is thus capable of moving the external member or of capturing a movement of this member.