Electromechanical Microsystem With Deformable Diaphragm And Pin Actuation

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Solution Overview

Problem

Existing electromechanical microsystems have unsatisfactory performance in terms of movement amplitude, force, accuracy, energy consumption, and frequency capability, failing to provide a good trade-off between these parameters for actuation, gripping, and sensing applications.

Innovation Solution

An electromechanical microsystem comprising a movable transducer with a deformable diaphragm and a cavity containing a deformable medium, allowing for large angular strokes and adaptable pin movement, enabling actuation, gripping, and sensing with improved performance in displacement amplitude, force, and frequency while reducing energy consumption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Length of moving object

If existing microsystems are used for actuation or gripping, then they can perform basic functions, but their performance in movement amplitude, force, and energy consumption is unsatisfactory

Engineering Contradiction:

Improvemovement amplitudeVSAvoidenergy consumption

Core Design Contradiction:

Length of moving objectVSUse of energy by moving object

Solution Approach 1:

The patent employs a deformable medium (fluid or gas) contained within a cavity to transmit mechanical forces generated by the electromechanical transducer to the diaphragm and pins. This hydraulic/pneumatic mechanism amplifies the movement amplitude while maintaining force transmission efficiency, resolving the contradiction between achieving large strokes and minimizing energy consumption.

Inventive Principle:

Principle #29Pneumatics and hydraulics

Solution Approach 2:

The deformable diaphragm acts as a flexible membrane that converts the volumetric changes in the cavity into mechanical displacement of the pins. This flexible element enables large movement amplitudes with minimal input energy by utilizing elastic deformation rather than rigid mechanical transmission.

Inventive Principle:

Principle #30Flexible shells and thin films

2Measurement precision

If existing microsystems are used for sensing, then they can detect movements, but their capability to detect over significant amplitude with high accuracy is limited

Engineering Contradiction:

Improvedetection accuracyVSAvoiddetection amplitude

Core Design Contradiction:

Measurement precisionVSLength of moving object

Solution Approach 1:

The system utilizes changes in the physical state of the deformable medium (pressure, volume) as the pins move through significant amplitudes. The electromechanical transducer detects these parameter changes with high precision, enabling accurate measurement over large detection ranges by monitoring the medium's response to pin displacement.

Inventive Principle:

Principle #35Parameter changes

3Force

If existing microsystems are used for actuation, then they can exert force, but their performance in frequency capability and force output is unsatisfactory

Engineering Contradiction:

Improveexerted forceVSAvoidfrequency capability

Core Design Contradiction:

ForceVSSpeed

Solution Approach 1:

The deformable medium and diaphragm system naturally responds to periodic actuation with resonant frequencies that can be optimized for high-frequency operation. The elastic properties of the diaphragm and compressibility of the medium enable rapid cyclic deformation, allowing the system to maintain high force output at elevated frequencies.

Inventive Principle:

Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The microsystem achieves significant displacement amplitudes, accurate object manipulation, and efficient energy use, making it suitable for various applications requiring high performance in actuation, gripping, and sensing with a compact design.

Implementation Method 1

the cavity being configured to hermetically contain a deformable medium capable of keeping a substantially constant volume under the action of a change of an external pressure exerted on the deformable medium

Methodology Applied

Scientific EffectIncompressibility:

Implementation Method 2

Said at least one portion of the deformable diaphragm has at least one area freely deformable, preferably elastically, as a function of said change in the external pressure

Methodology Applied

Scientific EffectElastic deformation: Elasticity

Data Source

PatentUS11999613B2Electromechanical microsystem

Publication Date: 2024.06.04 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

AI summary

An electromechanical microsystem including an electromechanical transducer, a deformable diaphragm and a cavity hermetically containing a deformable medium keeping a constant volume under the action of an external pressure change. The deformable diaphragm forms a wall of the cavity and has at least one free area so as to be elastically deformed. The electromechanical transducer is configured so that its movement depends on the change in the external pressure, and vice versa. The free area cooperates with an external member so that its deformation induces, or is induced by, a movement of the external member. Thus, the electromechanical microsystem is adapted to displace the external member or to detect a movement of this member, the electromechanical microsystem includes at least one pin, configured to bear on a peripheral portion of the free area so that a deformation of the free rea causes an inclination of the pin.