Single-use Microvalve with Meltable Seal for Vacuum Integrity
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Solution Overview
Problem
Existing microvalves are not substantially leak-free in their closed state, which can compromise vacuum applications and the maintenance of low-pressure environments, as they allow molecular and atomic entry into sealed spaces.
Innovation Solution
A microvalve device featuring an island structure with a through via surrounded by meltable sealing material, where a heater element is used to heat and solidify the sealing material into a toroid shape, creating a permanent, leak-free seal through surface tension, ensuring high flow rates in the open state and minimal leakage in the closed state.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If existing microvalves are used to seal closed spaces, then the valve can be closed to prevent flow, but the valve is not substantially leak-free allowing molecular and atomic entry into sealed spaces
Solution Approach 1:
The patent utilizes phase transition of the sealing material from solid to liquid and back to solid. The heater element heats the sealing material to its melting point, causing it to flow and fill the throughvia completely. Upon cooling, the material solidifies forming a hermetic seal that prevents molecular and atomic leakage, achieving substantially leak-free closure.
Solution Approach 2:
The sealing material acts as an intermediary substance between the heater element and the throughvia. This material transfers the thermal energy from the heater to the via region, and through its phase change, creates a permanent seal that blocks the passage of molecules and atoms, resolving the leakage issue.
2Reliability
If a microvalve is designed to be permanently sealable, then it can provide hermetic sealing for vacuum applications, but it requires additional components like heater elements and meltable sealing material
Solution Approach 1:
The patent combines multiple functions into integrated components. The island structure serves as both a mechanical support and a heater element. The sealing material is integrated directly into the throughvia region rather than being a separate component. This merging reduces the number of discrete parts while achieving hermetic sealing capability.
Solution Approach 2:
The island structure serves itself by functioning as both a structural element and a heating element. When current is applied, the island structure automatically generates the heat needed to melt and seal the sealing material, eliminating the need for a separate heater component and simplifying the overall device.
3Reliability
If a microvalve uses meltable sealing material surrounded by a heater element, then it can achieve permanent leak-free seals, but the manufacturing process becomes more complex
Solution Approach 1:
The sealing material is pre-positioned around the throughvia during fabrication, before the sealing operation. The island structure is also pre-formed with integrated heating traces. This preliminary preparation allows the actual sealing to be achieved through a simple thermal process rather than requiring complex assembly steps, easing manufacturing.
Solution Approach 2:
The patent utilizes changes in physical parameters of the sealing material (temperature, phase state) to achieve sealing. By controlling the temperature parameter through the integrated heater, the material transitions from solid to liquid and back, creating the seal. This parameter-based approach is more manufacturable than mechanical sealing methods.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The microvalve achieves a substantially leak-free, permanently sealed state, suitable for vacuum applications and maintaining low-pressure environments with minimal ion leakage, extending the operational life of vacuum systems by preventing contamination and maintaining vacuum conditions.
Implementation Method 1
a heater element is positioned on the island structure for sealing the material over the through via by heating the sealing material
Implementation Method 2
The microvalve is then actuated to close, forming a permanent, substantially leak-free seal. Upon thermal actuation, the hollow cylinder of sealing material reflows into a toroid due to surface tension.
Data Source
AI summary
A microvalve device is provided that includes a through via located in an island structure supported on a thermally-insulating membrane supported by a frame. The through via is surrounded by a meltable sealing material. A heater element is positioned on the island structure for sealing the material over the through via by heating the sealing material.