Microvalve Pressure Balancing to Prevent Diaphragm Flow Blockage

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Solution Overview

Problem

In valve systems using negative pressure to control gas flow, the diaphragm layer can inadvertently block the inlet and outlet when elastically deformed, leading to flow path obstruction.

Innovation Solution

A valve system with a laminated microvalve structure incorporating a diaphragm layer and a pressure adjustment mechanism that reduces the pressure difference between flow paths, preventing the diaphragm layer from blocking the inlet and outlet during negative pressure generation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If negative pressure is applied to the outlet side to suck gas into the microvalve, then gas flow is achieved, but the diaphragm layer may deform and block the inlet and outlet

Engineering Contradiction:
Improvegas flow rateVSAvoidflow path obstruction
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The pressure adjustment mechanism applies a counterbalancing pressure from the pneumatic fluid side to offset the negative pressure effect on the diaphragm layer. By controlling the pressure difference between the gas flow path and pneumatic fluid flow path, the mechanism creates a counteracting force that prevents the diaphragm layer from deforming into the inlet and outlet, thereby maintaining gas flow without causing flow path obstruction.

Inventive Principle:
Principle #8Anti-weight (Counterweight)

2Force

If the pressure difference between the second flow path and third flow path is large, then the diaphragm layer deforms significantly, but this causes inlet and outlet blocking during gas suction

Engineering Contradiction:
Improvediaphragm deformation forceVSAvoidflow path clearance
Core Design Contradiction:
ForceVSReliability

Solution Approach 1:

The pressure adjustment mechanism dynamically controls the pressure difference parameter between the gas flow path and pneumatic fluid flow path. By adjusting this pressure difference parameter, the mechanism ensures that the diaphragm layer deforms sufficiently to close the flow path when required, while preventing excessive deformation that would block the inlet and outlet during gas suction operation.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The pressure adjustment mechanism effectively reduces elastic deformation of the diaphragm layer, ensuring the inlet and outlet remain unobstructed during gas suction, enhancing the reliability of the valve system's operation.

Implementation Method 1

a diaphragm layer that is provided between the base layer and the cover layer and is elastically deformable in response to a flow of a pneumatic fluid, to block the inlet and the outlet

Methodology Applied
Scientific EffectElastic deformation: Elasticity

Implementation Method 2

The negative pressure generation mechanism is for generating a negative pressure on the second flow path side to suck gas from the first flow path forward the second flow path via the microvalve

Methodology Applied
Scientific EffectNegative pressure suction: Suction

Data Source

PatentUS11015735B2Valve system
Publication Date: 2021.05.25 SHIMADZU CORP
  • US11015735B2 patent drawing
  • US11015735B2 patent drawing
  • US11015735B2 patent drawing

AI summary

A first flow path is connected to an inlet for introducing gas into a microvalve. A second flow path is connected to an outlet for allowing gas to flow out of the microvalve. A third flow path is for introducing a pneumatic fluid into the microvalve. A negative pressure generation mechanism (a pump) is for generating a negative pressure on the second flow path to suck gas from the first flow path forward the second flow path via the microvalve. A pressure adjustment mechanism (a connection flow path and a valve) is for reducing a pressure difference between the second flow path and the third flow path to prevent the inlet and the outlet from being blocked by a diaphragm layer in response to the negative pressure generated on the second flow path side.