Microwave Antenna Aperture Adjustment for Variable Substrate Heating
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Solution Overview
Problem
Conventional antennas in substrate processing apparatuses are unable to adjust microwave emission ranges effectively in response to changes in process conditions, leading to resource wastage due to the need for replacing antennas with new designs.
Innovation Solution
An antenna unit with adjustable emission apertures controlled by movable adjustment plates that can alter the microwave emission range through horizontal or vertical movements, allowing precise adjustment of microwave emission patterns.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If conventional antennas with fixed wave emission apertures are used, then the antenna structure is simple and easy to manufacture, but the antenna cannot adapt to changing process conditions and requires replacement, leading to resource waste
Solution Approach 1:
The patent applies the dynamics principle by introducing movable adjustment plates that can shift the position of wave emission apertures. The adjustment plates are configured to move horizontally and vertically, allowing the antenna to dynamically adjust its microwave emission pattern according to different process conditions. This transforms the static antenna structure into a dynamic one that can adapt without replacement.
Solution Approach 2:
The antenna structure is segmented into multiple components: the base antenna body with fixed apertures, and movable adjustment plates that can independently control individual or groups of apertures. This segmentation allows selective adjustment of specific emission regions while maintaining the overall antenna structure, achieving adaptability without complete redesign.
2Adaptability or versatility
If fixed emission aperture antennas are used, then manufacturing cost is low, but resource waste occurs due to antenna replacement when process conditions change
Solution Approach 1:
By making the adjustment plates movable rather than fixed, the antenna can adapt to varying process conditions through repositioning existing apertures. This eliminates the need to manufacture and replace entire antennas when process parameters change, thereby reducing material waste and resource consumption.
Solution Approach 2:
The invention changes the positional parameters of wave emission apertures by moving adjustment plates to different locations. This allows the same physical antenna structure to serve multiple process conditions by altering which apertures are active and their effective positions, avoiding the need for new antennas.
3Manufacturing precision
If movable adjustment plates are added to enable aperture repositioning, then microwave emission range can be precisely controlled, but the device complexity increases
Solution Approach 1:
The adjustment mechanism is segmented into independent adjustment plates for different regions or groups of apertures. Each plate can be controlled separately, allowing precise control of specific emission zones without requiring complex coordinated movement of the entire antenna structure. This modular approach manages complexity while maintaining precision.
Solution Approach 2:
The adjustment plates serve as intermediary elements between the fixed antenna body and the microwave emission process. These plates mediate the control function by selectively blocking or exposing apertures, providing precise control over emission patterns without requiring direct manipulation of the antenna's fundamental structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise control of microwave emission ranges, reducing resource waste by allowing adaptation to varying process conditions without replacing antennas.
Implementation Method 1
an antenna having a plurality of wave emission apertures formed therein to emit microwaves for heat treatment of a substrate toward the substrate located below the antenna
Implementation Method 2
The microwaves propagate along the antenna. The antenna is formed to have a plurality of wave emission apertures formed therein to emit the propagating microwaves downwards therethrough
Data Source
AI summary
Disclosed are an antenna unit for performing a heat treatment process using microwaves and a substrate processing apparatus including the same. The antenna unit has a plurality of wave emission apertures formed therein to emit microwaves toward a substrate disposed below the antenna unit. At least one emission aperture among the plurality of wave emission apertures is provided as a variable emission aperture capable of controlling an emission range of the microwaves.