Microwave Charge Sensing for Semiconductor Optical Absorption

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Solution Overview

Problem

Modern infrared research materials, such as type-II superlattices, face challenges in characterization due to weak photoluminescence signals and errors in absorption measurements caused by substrate absorption, making it difficult to identify the bandgap of materials using conventional methods like Fourier-transform infrared spectroscopy.

Innovation Solution

A time-resolved microwave reflectance apparatus using a pulsed or modulated optical source and a microwave oscillator to detect charge carriers in semiconductor samples, allowing for non-contact, non-destructive measurement of optical absorption coefficients and band edges by monitoring the decay of reflected microwaves.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional FTIR absorption measurements are used, then optical absorption can be measured, but measurement precision deteriorates due to substrate absorption and referencing issues

Engineering Contradiction:
Improveoptical absorption measurement precisionVSAvoidsubstrate absorption interference
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent introduces microwave radiation as an intermediary probe to indirectly detect optical absorption. Instead of directly measuring optical photons through the substrate (which causes interference), microwaves interact with charge carriers generated by optical excitation, providing a substrate-independent measurement pathway that resolves the referencing and substrate absorption problems

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces the direct optical measurement system (FTIR detecting photons) with an electromagnetic induction system (microwave detection of charge carrier effects). This substitution transitions from direct optical detection to indirect electromagnetic detection, eliminating the harmful substrate absorption effects that plague conventional optical methods

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Measurement precision

If photoluminescence measurements are used to identify bandgap, then bandgap information can be obtained, but measurement precision deteriorates due to extremely weak signals in longwave infrared materials

Engineering Contradiction:
Improvebandgap identification precisionVSAvoidphotoluminescence signal intensity
Core Design Contradiction:
Measurement precisionVSIllumination intensity

Solution Approach 1:

The patent replaces the photoluminescence detection system with a microwave charge sensing system. Instead of detecting the weak optical emission from recombining carriers, the system detects the electromagnetic response of the charge carriers themselves via microwave reflection, providing a high-sensitivity alternative that works effectively for longwave infrared materials where PL signals are too weak

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the detection parameter from optical intensity (photoluminescence) to electrical conductivity (charge carrier response to microwaves). This parameter transformation allows detection of bandgap-related information through charge carrier dynamics rather than through weak optical emission, achieving high precision bandgap identification in materials with negligible PL signals

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If charge detection method is used, then measurement precision and sensitivity are improved, but device complexity increases due to microwave oscillator and detector requirements

Engineering Contradiction:
Improvecharge detection precisionVSAvoidmicrowave measurement system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent makes the microwave measurement system multi-functional by using it to detect both charge carrier concentration and bandgap energy. The same microwave oscillator and detector setup that measures charge dynamics can also extract optical absorption coefficients and band edge information, reducing the need for separate specialized equipment and justifying the complexity through multiple measurement capabilities

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables accurate determination of absorption coefficients and band edges without the need for separate reference materials or shielding, providing high sensitivity and throughput, even in cases where conventional methods fail due to low signal strengths.

Implementation Method 1

A time-resolved microwave reflectance apparatus comprises a pulsed or modulated optical source that irradiates a semiconductor sample with an optical excitation pump beam

Methodology Applied
Scientific EffectPhotoexcitation: Photoelectric Effect

Implementation Method 2

a microwave oscillator that irradiates the sample with a continuous beam of microwaves, and a microwave detector that detects the microwaves reflected by the sample

Methodology Applied
Scientific EffectMicrowave reflection: Reflection

Implementation Method 3

measuring the time decay of the microwaves reflected from the sample after irradiation by the optical excitation pump beam

Methodology Applied
Scientific EffectTime-resolved microwave reflectance:

Data Source

PatentUS11125700B2Apparatus and method to measure semiconductor optical absorption using microwave charge sensing
Publication Date: 2021.09.21 NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA LLC
  • US11125700B2 patent drawing
  • US11125700B2 patent drawing
  • US11125700B2 patent drawing

AI summary

A time-resolved microwave reflectance apparatus comprises a pulsed or modulated optical source that irradiates a semiconductor sample with an excitation pump beam, a microwave oscillator that irradiates the sample with a continuous beam of microwaves, and a microwave detector that detects the microwaves reflected by the sample. Therefore, charge detection, rather than conventional absorption measurements (that detect the loss of photons), can be used to extract the absorption coefficient and band edge of a semiconductor material.