Microwave Detection Device Sealing for Moisture Intrusion
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Solution Overview
Problem
The detection accuracy of microwave power in plasma processing apparatuses is compromised due to moisture intrusion through gaps in the housing, which affects the characteristics of the detection circuit and leads to deterioration in the accuracy of microwave power detection.
Innovation Solution
A detection device with a substrate and a housing that includes a connector and an output port, sealed by sealing members to prevent moisture intrusion, which improves the assemblability and maintains the accuracy of microwave power detection by stabilizing the surface resistance and dielectric constant of the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the housing is designed with openings for connector and output port to enable assembly and connectivity, then the ease of manufacture and operation is improved, but moisture can intrude through the gaps causing deterioration in detection accuracy
Solution Approach 1:
A sealing member is introduced as an intermediary component between the housing and the connector/output port assemblies. This sealing member fills the gaps at the openings to prevent moisture intrusion, thereby maintaining detection accuracy while preserving the ease of assembly provided by the removable connector and output port structures.
2Measurement precision
If sealing members are added to prevent moisture intrusion, then the detection accuracy is improved, but the device complexity increases
Solution Approach 1:
The sealing member is implemented as a flexible sealing component that can be integrated into the existing housing structure. This flexible sealing approach provides effective moisture protection while maintaining a relatively simple overall device structure, as the sealing member can be installed at the openings without requiring major structural modifications.
Data Source
AI summary
A detection device includes a substrate on which a connector connected to a transmission line for microwaves, a detection circuit configured to convert the microwaves inputted from the transmission line via the connector to a detection value indicating power of the microwaves, and an output port configured to output the detection value obtained by the detection circuit are disposed. The detection device further includes a housing that has a first opening and a second opening and accommodates the substrate in a state where the connector is inserted into the first opening and the output port is inserted into the second opening. The detection device further includes a first sealing member provided at the first opening of the housing to seal a periphery of the connector; and a second sealing member provided at the second opening of the housing to seal a periphery of the output port.