Microwave Induction Heating for Submicron Conductive Materials

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Solution Overview

Problem

Conventional heating methods fail to effectively heat conductive materials thinner than a micrometer, such as thin films and fine wires, due to issues like electric discharge and limited penetration depth of induced currents, making high-temperature processing inefficient and costly.

Innovation Solution

A microwave induction heating device using a dielectric resonator and microwave coupler generates a magnetic field to induce currents in conductive materials, allowing selective heating of thin films and wires with a penetration depth of about 1 μm, utilizing a metallic body to prevent microwave leakage and a control device to adjust heating intensity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If conventional induction heating with kHz frequency is used, then heating of thick conductive materials is effective, but penetration depth is limited to about 1 mm making it unsuitable for thin films

Engineering Contradiction:

Improveheating effectivenessVSAvoidpenetration depth

Core Design Contradiction:

TemperatureVSLength of stationary object

Solution Approach 1:

The invention changes the frequency parameter from conventional kHz range to microwave GHz range (2.45 GHz specified), which fundamentally alters the penetration depth characteristics. This parameter change enables the magnetic field to penetrate much thinner conductive materials (less than 1 μm) while maintaining effective heating through induced currents.

Inventive Principle:

Principle #35Parameter changes

2Temperature

If microwave electric field is applied to conductive thin films for heating, then heating may occur, but electric discharge easily occurs due to electric field concentration at tips

Engineering Contradiction:

Improveheating capabilityVSAvoiddischarge damage risk

Core Design Contradiction:

TemperatureVSReliability

Solution Approach 1:

The invention substitutes the electric field mechanism with a magnetic field mechanism. Instead of using the microwave electric field to directly heat the conductive material (which causes discharge at sharp edges), the magnetic field induces currents within the material bulk, generating heat through resistive heating without the discharge problems associated with electric field concentration.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The invention introduces a dielectric resonator as an intermediary that converts the microwave electric field into a magnetic field. The dielectric resonator absorbs microwave energy and generates a strong magnetic field that then acts on the conductive thin film, indirectly achieving heating while avoiding the harmful direct electric field interaction.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Productivity

If high power microwave heating is applied to conductive materials, then heating efficiency improves, but electric discharge damage risk increases

Engineering Contradiction:

Improveheating efficiencyVSAvoiddischarge damage

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

By replacing electric field-based heating with magnetic field-based induction heating, the invention enables high power operation without the discharge damage problem. The magnetic field penetrates the conductive material and induces currents throughout the volume, allowing high power delivery that converts efficiently to heat without the field concentration and breakdown issues of electric fields.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device enables rapid, efficient, and high-temperature heating of very thin conductive materials with reduced energy consumption, improving productivity and enabling heat treatment of materials that conventional methods cannot handle.

Implementation Method 1

a microwave band induction heating device for heating a target material by generating an induced current in the target material using a microwave band magnetic field

Methodology Applied

Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

an electric resistance heating mechanism is a process in which heat is generated due to resistance to electric current

Methodology Applied

Scientific EffectJoule heating: Joule Heating

Implementation Method 3

a dielectric resonator disposed to be spaced a predetermined distance apart from the microwave coupler and configured to operate by receiving a microwave from the microwave coupler

Methodology Applied

Scientific EffectResonance: Resonance

Data Source

PatentUS12396069B2Microwave band induction heating device

Publication Date: 2025.08.19 KOREA ELECTROTECH RES INST

AI summary

A microwave band induction heating device is disclosed. The microwave band induction heating device has a microwave input part for receiving microwaves; a microwave coupler connected to the microwave input part; a dielectric resonator which is disposed so as to be spaced apart from the microwave coupler by a predetermined distance and operates based on the microwaves received from the microwave coupler; a metallic body disposed so as to surround the microwave input part, the microwave coupler, and the dielectric resonator, thereby preventing the microwaves from leaking to the outside; and a microwave leakage prevention part which is coupled to the exterior of the metallic body and assists in prevention of leakage of the microwaves to the outside in an open space between the inside and the outside of the metallic body.