Microwave Plasma Abatement Apparatus Dynamic Power Control

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Microwave plasma abatement devices face inefficiencies when treating gas streams with varying concentrations and flow rates from multiple process chambers, leading to wasted power, overheating, and potential damage due to incomplete microwave absorption.

Innovation Solution

A microwave plasma abatement apparatus with a monitoring system that adjusts the microwave power based on unabsorbed energy levels, using a detector to optimize power delivery and maintain efficient destruction of greenhouse gases.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If microwave power is set at a fixed high level to ensure high destruction efficiency at maximum gas flow rates, then destruction and removal efficiency is improved, but power wastage increases and overheating occurs when gas flow rate is low

Engineering Contradiction:

Improvedestruction and removal efficiencyVSAvoidpower wastage

Core Design Contradiction:

ProductivityVSLoss of energy

Solution Approach 1:

The microwave power is made dynamically adjustable rather than fixed. The system continuously monitors unabsorbed microwave energy and adjusts the generated power accordingly to match the actual absorption capacity of the gas stream, ensuring high destruction efficiency while avoiding power wastage and overheating

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

A feedback control system is implemented where a detector monitors the amount of unabsorbed microwave energy and feeds this information back to adjust the microwave power generation. This closed-loop control ensures the system adapts to varying gas flow rates and maintains optimal destruction efficiency without excessive power consumption

Inventive Principle:

Principle #23Feedback

2Productivity

If microwave power is set at a fixed high level to maintain destruction efficiency, then destruction and removal efficiency is improved, but the microwave generator may be damaged due to reflection of unabsorbed microwave radiation

Engineering Contradiction:

Improvedestruction and removal efficiencyVSAvoidmicrowave generator reliability

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The feedback control system detects unabsorbed microwave energy and adjusts power generation accordingly, preventing excessive reflected power that could damage the microwave generator while maintaining sufficient power for effective gas treatment

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The dynamic adjustment of microwave power prevents the generator from operating at excessively high power levels that would cause damage, while still maintaining high enough power to ensure effective destruction of greenhouse gases

Inventive Principle:

Principle #15Dynamics

3Productivity

If fixed high microwave power is used to ensure destruction efficiency across all conditions, then destruction and removal efficiency is improved, but the system becomes less adaptable to varying gas stream conditions

Engineering Contradiction:

Improvedestruction and removal efficiencyVSAvoidadaptability to varying gas conditions

Core Design Contradiction:

ProductivityVSAdaptability or versatility

Solution Approach 1:

The feedback control system enables the system to automatically adapt to varying gas stream conditions by monitoring unabsorbed microwave energy and adjusting power generation accordingly, maintaining high destruction efficiency across different operating conditions

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The system transitions from a static fixed-power operation to a dynamic adaptive operation, continuously adjusting microwave power to match the actual absorption capacity of the gas stream under varying flow rates and compositions

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system ensures high destruction and removal efficiency while minimizing power wastage and preventing overheating, maintaining optimal performance across varying gas stream conditions.

Implementation Method 1

a microwave generator (30), a waveguide (34) for conveying microwave energy from the microwave generator (30) to a gas chamber (36)

Methodology Applied

Scientific EffectMicrowave radiation: Microwave Radiation

Implementation Method 2

within which a plasma is generated using the microwave energy

Methodology Applied

Scientific EffectMicrowave absorption and plasma generation: Dielectric Heating

Implementation Method 3

Under the intensive conditions within the plasma, species within the gas stream are subjected to impact with energetic electrons causing dissociation into reactive species

Methodology Applied

Scientific EffectPlasma dissociation: Plasma

Implementation Method 4

a detector (60) for detecting the amount of microwave energy that is not absorbed within the gas chamber (36)

Methodology Applied

Scientific EffectMicrowave detection: Microwave Radiation

Data Source

PatentUS9044707B2Microwave plasma abatement apparatus

Publication Date: 2015.06.02 EDWARDS LTD

AI summary

In a method of operating a microwave plasma abatement apparatus comprising a microwave generator, and a gas chamber for receiving microwave energy from the microwave generator and within which a plasma is generated using the microwave energy, the amount of microwave energy that is not absorbed within the gas chamber is monitored, and the power of the microwave energy generated by the microwave generator is adjusted in dependence on the monitored microwave energy.