Microwave Plasma Torch for Atmospheric Material Synthesis
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Solution Overview
Problem
Current methods for synthesizing new materials, such as CVD and high temperature vacuum sputter deposition, face difficulties in activating and decomposing precursors due to high bond energies among molecules or atoms, making it challenging to achieve efficient material growth.
Innovation Solution
A method utilizing a microwave plasma torch system operating at atmospheric pressure and high temperature, which includes a high power microwave source, coaxial plasma torch generator, and a material growth system with a quartz glass tube and adjustable DC source, enables the decomposition of precursor gases into activating particles and controlled material growth through electric field manipulation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional chemical vapor deposition or vacuum sputter deposition is used, then material synthesis can be achieved, but precursor activation and decomposition is extremely difficult due to high bond energy among molecules or atoms
Solution Approach 1:
The patent changes the fundamental parameters of the synthesis environment by operating at atmospheric pressure instead of vacuum, and using microwave plasma to generate high-energy photons and reactive species that effectively break high bond energy bonds in precursors, enabling efficient activation and decomposition
Solution Approach 2:
The patent replaces conventional thermal heating or vacuum-based mechanical deposition processes with microwave plasma excitation, using electromagnetic energy to directly activate and decompose precursor molecules into reactive species for material synthesis
2Productivity
If high temperature and vacuum sputter deposition are used, then material growth can occur, but the process complexity and difficulty in controlling material growth increases
Solution Approach 1:
The patent simplifies the process by using atmospheric pressure instead of vacuum, eliminating the need for complex vacuum systems while maintaining high material growth rates through microwave plasma activation and controlled precursor delivery
Solution Approach 2:
The patent implements feedback control mechanisms to regulate precursor flow rates, microwave power, and environmental conditions, enabling precise control over material growth composition and structure while maintaining high productivity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively overcomes the challenges of precursor activation and material growth control, allowing for the rapid synthesis of new materials from various precursor states and types, achieving high-performance materials with precise control over particle beam distribution and temperature.
Implementation Method 1
The cutting-edge breakdown happens between the end of the coaxial central hollow conductor and the igniter electrode when high power microwave input to there
Implementation Method 2
stable plasma torch by the discharge of point shape and avalanche effect under the action of high power microwave
Implementation Method 3
High power microwave was input from the microwave source to the output-end of the plasma torch generator by the coupling and transmitting structure
Implementation Method 4
The precursor carrier gases from the output-end of the coaxial central hollow conductor come into being stable plasma torch
Implementation Method 5
the cutting-edge breakdown happens between the end of the coaxial central hollow conductor and the igniter electrode when high power microwave input to there
Implementation Method 6
The electric field in the growth space comes into being due to the DC source with the metal ring and the igniter electrode
Implementation Method 7
The motion of negative & positive ions, electrons and particles in the activating particles beam would change under the effect of the electric field
Implementation Method 8
The growth space is heated for the material growth
Implementation Method 9
water circulation structure for temperature isolation
Data Source
AI summary
An apparatus for a material synthesis technology by microwave plasma torch with atmospheric pressure and high temperature. The apparatus includes a plasma torch system and a material growth system. In the plasma torch system, the cutting-edge breakdown happens through inputting the high-power microwave. Then the stable plasma torch with atmosphere pressure and high temperature is achieved in precursor at the open-end of the cylindrical metal tube. The precursors are decomposed by the plasma torch with high temperature and the active particles for material growth are achieved. In the material growth system, the motion and ingredients proportion of negative and positive icons or particles in the active particle beam are controlled by the adjustable static electric field in the space between the plasma torch and material growth space. The material-controlled growth is implemented by the heating system and the adjustable static electrical field.