Microwave Power Correction Function for Wave Detector Error Compensation
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Solution Overview
Problem
In the electronic device manufacturing field, achieving accurate power control of pulse-modulated microwaves is challenging due to errors in wave detectors, which affect plasma stability and efficiency, and existing methods require complex calibration across various process conditions.
Innovation Solution
A method is provided to determine a correction function for wave detectors by measuring power at different setting levels, calculating errors, and approximating correction values using logarithmic functions to establish a relationship between setting power, duty ratio, and correction values, enabling accurate power control and stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If wave detector is used to measure microwave power, then power measurement is enabled, but measurement precision deteriorates due to detector errors
Solution Approach 1:
A correction function is introduced as an intermediary element between the wave detector and the final power measurement. This correction function, determined through calibration measurements at multiple power levels and duty ratios, compensates for the detector's measurement errors. The correction process involves measuring actual power values with a reference device, calculating correction values, and applying these corrections to subsequent measurements, thereby eliminating the detector's inherent inaccuracies.
2Measurement precision
If calibration is performed across various process conditions, then measurement accuracy is improved, but device complexity increases
Solution Approach 1:
The calibration process is segmented into discrete steps involving specific duty ratios (e.g., 10% and 100%) and multiple power levels. By dividing the calibration into these manageable segments, the system determines correction functions for each segment separately. This segmented approach makes the complex calibration process more systematic and easier to implement, while still achieving comprehensive coverage of operating conditions.
Solution Approach 2:
The calibration process systematically varies key parameters including duty ratio, power level, and measurement frequency. By changing these parameters across defined ranges and determining correction functions for each combination, the system comprehensively characterizes detector behavior under different operating conditions. This parameter-based approach organizes the complexity into a structured framework that can be efficiently managed and applied.
3Adaptability or versatility
If correction function is determined for multiple duty ratios, then adaptability is improved, but measurement precision requirements increase
Solution Approach 1:
The correction function is designed to be universal across multiple duty ratios and power levels. By determining a single correction function through calibration measurements at various conditions, the system achieves broad applicability. The correction function can be applied to measurements at any duty ratio within the calibrated range, eliminating the need for separate correction functions for each operating condition and reducing the overall precision requirements for individual measurements.
Data Source
AI summary
A method includes setting a setting duty ratio of a pulse to a predefined first setting duty ratio, detecting a measured value of power of a microwave, and calculating an error of the measured value of the power with respect to the setting power level for each setting power level, calculating a correction value for the power for each setting power level on the basis of the error, and determining a first function indicating a relationship between the setting power level and the correction value by logarithmically approximating the relationship between the setting power level and the correction value, and determining the correction function indicating a relationship among the setting duty ratio, the setting power level, and the correction value by approximating the correction value defined by the first function, and the predefined correction value at a setting duty ratio of 100%, with a linear function.