Modular Microwave Resonator Array for Uniform Plasma Processing
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Solution Overview
Problem
High-frequency radiation systems, such as those using a single antenna, face challenges in creating uniform plasma density and geometry that matches the substrate being processed, particularly for larger substrates, leading to non-uniform processing and difficulty in adjusting radiation field density to compensate for substrate non-uniformity.
Innovation Solution
A source array with a dielectric plate and multiple resonators coupled to power amplifiers, allowing for modular microwave power delivery and improved control over plasma parameters, including a monolithic source array that integrates applicators to enhance uniformity and reduce assembly variations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single antenna or waveguide system is used for microwave plasma generation, then the system structure is simplified, but the plasma uniformity and geometry matching with the substrate deteriorates
Solution Approach 1:
The patent divides the single microwave source into multiple independent resonators (e.g., 4-16 resonators arranged in an array), each capable of being independently controlled. This segmentation allows the plasma to be generated more uniformly across the substrate surface while maintaining a manageable system structure through modular design.
Solution Approach 2:
Each resonator in the array can be independently tuned and controlled to provide localized plasma generation. This enables different regions of the substrate to receive appropriately tailored plasma conditions, improving overall plasma uniformity and geometry matching without requiring a completely complex system architecture.
2Power
If a waveguide transmission path is used, then microwave power can be transmitted effectively, but the system size increases and design flexibility is limited
Solution Approach 1:
Instead of using a single long waveguide transmission path, the patent segments the microwave delivery into multiple short-range resonators positioned close to the substrate. Each resonator receives power from a separate amplifier, eliminating the need for long waveguides and associated tuning components, thus reducing overall system size while maintaining effective power transmission.
Solution Approach 2:
The patent introduces solid-state power amplifiers as intermediaries between the microwave source and the resonators. These amplifiers provide the necessary power to each resonator independently, replacing the traditional waveguide transmission path and its associated components (tuners, couplers, mode transformers), thereby reducing system size and increasing design flexibility.
3Area of stationary object
If a slot line antenna is used to spread microwave energy, then the energy distribution is extended, but the system becomes complicated and power density coupling is limited
Solution Approach 1:
The patent replaces the single slot line antenna with an array of multiple small resonators. Each resonator independently contributes to the overall energy distribution across the substrate. This segmentation achieves extended energy coverage without the geometric constraints and complications of slot line antennas, while maintaining simplicity through standardized resonator units.
Solution Approach 2:
The patent changes the fundamental parameter of how microwave energy is distributed - from a continuous slot line geometry to discrete resonant elements. This allows for flexible adjustment of the number, position, and size of resonators to match various substrate geometries, achieving extended energy distribution with simpler, more adaptable system design and higher power density coupling capability.
4Quantity of substance
If microwave plasma is generated with higher frequency, then plasma density and excited neutral species concentration increase, but the radiation field geometry becomes constrained
Solution Approach 1:
The patent uses multiple small resonators instead of a single large antenna to generate the microwave plasma. Each resonator creates a localized radiation field that can be independently shaped and positioned. This segmentation allows the overall radiation field geometry to be tailored to match the substrate shape and size, enabling uniform plasma generation across large substrates while maintaining the benefits of high-frequency plasma generation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides improved plasma uniformity and control, reducing non-uniformity issues, enabling efficient processing of larger substrates with reduced downtime and cost, and allowing for scalable and compact system design.
Implementation Method 1
high-frequency radiation systems, including for use in plasma processing... microwave frequencies... a plurality of resonators on the surface of the dielectric plate... each one of the plurality of power amplifiers is coupled to a corresponding one of the plurality of resonators
Implementation Method 2
A plurality of resonators is on the surface of the dielectric plate... allowing for modular microwave power delivery and improved control over plasma parameters
Data Source
AI summary
Embodiments disclosed herein include a source array. In an example, a source array includes a dielectric plate having a surface. A plurality of resonators is on the surface of the dielectric plate. The source array also includes a plurality of power amplifiers. Each one of the plurality of power amplifiers is coupled to a corresponding one of the plurality of resonators.