Microwave Stirrer Rotation for Uniform Substrate Heating
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Solution Overview
Problem
Microwave heating in semiconductor device manufacturing often leads to non-uniform temperature distribution on substrates, resulting in deteriorated processing uniformity and productivity.
Innovation Solution
A substrate processing apparatus equipped with a microwave stirrer that rotates due to gas flow within the process chamber, preventing standing waves and ensuring uniform temperature distribution by stirring the microwave.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If microwave heating is performed for substrate processing, then heating efficiency is improved, but temperature distribution uniformity deteriorates
Solution Approach 1:
The patent applies the dynamics principle by making the microwave stirrer rotate during microwave heating. The stirrer rotates in the same direction as the substrate rotation, creating a dynamic system where the microwave field continuously changes its interaction with the substrate. This rotational movement prevents standing wave formation and ensures uniform temperature distribution across the substrate surface while maintaining high heating efficiency.
2Productivity
If microwave heating is performed for substrate processing, then processing speed is improved, but temperature distribution uniformity deteriorates
Solution Approach 1:
The patent applies the dynamics principle by making the microwave stirrer rotate during microwave heating. The stirrer rotates in the same direction as the substrate rotation, creating a dynamic system where the microwave field continuously changes its interaction with the substrate. This rotational movement prevents standing wave formation and ensures uniform temperature distribution across the substrate surface while maintaining high heating efficiency.
3Manufacturing precision
If a microwave stirrer is added to improve temperature uniformity, then temperature distribution uniformity is improved, but device complexity increases
Solution Approach 1:
The patent applies the universality principle by designing the microwave stirrer to serve multiple functions: it stirs the microwave field to prevent standing waves, rotates in synchronization with the substrate to maintain uniform heating, and can be integrated with the existing substrate rotation mechanism. This multi-functional design minimizes additional complexity while achieving temperature uniformity.
4Manufacturing precision
If the microwave stirrer rotates in the same direction as substrate rotation, then temperature distribution uniformity is improved, but energy consumption increases
Solution Approach 1:
The patent applies the merging principle by combining the microwave stirrer rotation with the substrate rotation mechanism. Both rotate in the same direction at the same speed, allowing them to share the same drive system or synchronization mechanism. This reduces energy consumption compared to having independent rotation systems, while still achieving uniform temperature distribution through the stirrer's microwave-field-interacting motion.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively maintains uniform temperature distribution during microwave heating, enhancing the productivity and quality of substrate processing by preventing substrate deformation and improving processing uniformity.
Implementation Method 1
a microwave stirrer configured to stir the microwave by being rotated due to a flow of the gas in the process chamber
Implementation Method 2
a microwave supplier configured to supply a microwave into the process chamber
Data Source
AI summary
There is provided a technique that includes: a process chamber in which a substrate is processed; a gas supplier configured to supply a gas into the process chamber; a microwave supplier configured to supply a microwave into the process chamber; and a microwave stirrer configured to stir the microwave by being rotated due to a flow of the gas in the process chamber.