Microwave-Transparent Temperature Sensor Pin for Vacuum Substrates
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Solution Overview
Problem
Conventional pyrometers fail to accurately measure substrate temperatures in harsh microwave and vacuum environments due to their limitations in these conditions, leading to inaccurate temperature readings.
Innovation Solution
An apparatus comprising a substrate holder with support pins, a temperature sensor assembly with a phosphorous coating and a spring mechanism for enhanced thermal contact, and an optical transmission assembly to relay light emissions for temperature detection, all made from microwave-transparent materials with high thermal conductivity, allowing for accurate temperature measurement in microwave and vacuum environments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional pyrometers are used to measure substrate temperature, then temperature measurement capability is provided, but measurement precision deteriorates in microwave and vacuum environments
Solution Approach 1:
The patent introduces a microwave-transparent window as an intermediary component that allows optical signals to pass through the microwave environment without interference. This window enables the pyrometer to measure substrate temperature accurately by transmitting infrared radiation from the substrate to the detector while blocking microwave interference, thus resolving the contradiction between providing temperature measurement capability and maintaining measurement precision in microwave environments.
Solution Approach 2:
The patent modifies the operational parameters of the temperature measurement system by selecting specific wavelengths in the infrared spectrum that can penetrate through the microwave environment and vacuum conditions. By changing the measurement wavelength parameter to match the transmission characteristics of the microwave-transparent window and the substrate's thermal radiation spectrum, the system achieves accurate temperature measurements despite the harsh environment.
2Measurement precision
If microwave transparent materials with high thermal conductivity are used, then temperature measurement accuracy is improved, but device complexity increases
Solution Approach 1:
The microwave-transparent window serves multiple functions simultaneously: it acts as an optical transmission medium for infrared radiation, provides microwave transparency to block electromagnetic interference, and serves as a structural component of the chamber assembly. By making this single component fulfill multiple roles, the patent improves temperature measurement accuracy without proportionally increasing device complexity.
Solution Approach 2:
The patent employs composite material construction for the microwave-transparent window, combining materials with specific properties: optical transparency in the infrared range, microwave transparency, and appropriate thermal conductivity. This composite approach allows the window to meet multiple performance requirements simultaneously, achieving accurate temperature measurement while maintaining a relatively simple overall device structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise temperature measurement in harsh environments, independent of substrate material, and supports both static and rotating substrates, providing holistic heating patterns and PID temperature control across various conditions from ultra-high vacuum to atmospheric pressures.
Implementation Method 1
a temperature sensor assembly with at least a portion of a surface with a phosphorous coating
Implementation Method 2
an optical transmission assembly embedded into at least a portion of the substrate holder and configured to receive light emissions from the at least a portion of the surface of the temperature sensor assembly and to relay the light emissions to a temperature detection assembly
Implementation Method 3
a spring that provides upward motion of the temperature sensor pin and is configured to enhance thermal contact with a warped substrate when present by providing an upward force against the substrate
Implementation Method 4
the temperature sensor pin is made of a material with a thermal conductivity greater than approximately 200 W/mK
Data Source
AI summary
An apparatus for determining temperatures of substrates in microwave and/or vacuum environments. A substrate holder with a plurality of support pins includes a temperature sensor assembly with at least a portion of a surface with a phosphorous coating is configured to be inserted in at least one pin support position from an inner area of the substrate holder and in at least one pin support position from an outer area of the substrate holder. The temperature sensor assembly includes a temperature sensor pin with a spring that is microwave transparent. The temperature sensor pin is made of a material with a thermal conductivity greater than approximately 200 W/mK and a low thermal mass which is microwave transparent. An optical transmission assembly is embedded into at least a portion of the substrate holder to receive light emissions from a surface of the temperature sensor pin.