MIEC Tunnel Selector Structure for ReRAM Sneak Path Suppression

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Solution Overview

Problem

Resistive random-access memory (ReRAM) arrays face challenges in minimizing leakage current and power dissipation due to sneak paths, which occur when non-selected memory cells receive half the voltage differential during read/write operations, leading to significant leakage currents and power dissipation.

Innovation Solution

A selector device is implemented in the memory array, comprising a first electrode, a second electrode, and a separator with mixed ionic-electronic conduction material. The separator includes first ions that move away from the first electrode in response to applied voltage and is doped with second ions of opposing charge near the second electrode, optimizing the nonlinear response to prevent leakage current unless the full VDD voltage is applied.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If traditional flash memory or ReRAM cells are used in memory arrays, then memory cell density can be increased, but leakage current and power dissipation increase due to sneak paths in non-selected cells

Engineering Contradiction:
Improvememory cell densityVSAvoidpower dissipation
Core Design Contradiction:
Quantity of substanceVSLoss of energy

Solution Approach 1:

A selector device is introduced as an intermediary component between the ReRAM cell and the memory array bit lines. This selector device acts as a mediator that controls current flow, allowing full VDD voltage to reach only the selected memory cell while blocking sneak paths in non-selected cells, thereby reducing power dissipation while maintaining high memory cell density

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The selector device utilizes changes in electrical conductivity parameters based on applied voltage. At low voltages (sneak paths), the selector remains in a high-resistance state blocking current. When full VDD voltage is applied to the selected cell, the selector transitions to a low-resistance state, enabling current flow only through the selected memory cell, thus dynamically controlling power dissipation

Inventive Principle:
Principle #35Parameter changes

2Device complexity

If ReRAM cells are implemented without selector devices, then device complexity is reduced, but leakage current through sneak paths becomes significant

Engineering Contradiction:
Improvememory cell structureVSAvoidleakage current
Core Design Contradiction:
Device complexityVSObject-generated harmful factors

Solution Approach 1:

The selector device serves as an intermediary element that selectively enables or disables current paths. It is positioned in series with the ReRAM cell, acting as a gatekeeper that prevents leakage current in non-selected cells while allowing legitimate current flow in the selected cell, thus eliminating sneak path problems with minimal added complexity

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The selector device exhibits dynamic resistance characteristics that change based on the applied voltage and operational state. During read/write operations, it dynamically transitions between high-resistance (blocking) and low-resistance (conducting) states, adaptively controlling leakage current suppression while maintaining low complexity in the static structure

Inventive Principle:
Principle #15Dynamics

3Reliability

If a selector device with mixed ionic-electronic conduction is used, then rectification characteristics improve and leakage current reduces, but device complexity increases

Engineering Contradiction:
Improverectification characteristicsVSAvoidselector device structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The separator in the selector device is constructed from composite material exhibiting mixed ionic-electronic conduction properties. This composite structure combines ionic conductors and electronic conductors in a single layer, enabling the device to achieve superior rectification characteristics and reliability while maintaining a relatively simple overall device structure compared to using multiple separate components

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The separator is doped with fixed charges at specific locations (near one of the electrodes) to create local variations in electrical properties. This localized doping creates asymmetric charge distribution that enhances rectification characteristics in specific regions of the separator, improving overall device reliability without requiring complex structural modifications throughout the entire device

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The selector device effectively reduces leakage current and power dissipation by requiring a higher voltage for conduction, ensuring that only the selected memory cell is accessed, thereby minimizing disturbances and maintaining the stored state in non-accessed cells.

Implementation Method 1

The separator may include a mixed ionic-electronic conduction material with first ions that may include a first charge such that the first ions may respond to a voltage applied between the first electrode and the second electrode by moving away from the first electrode

Methodology Applied
Scientific EffectIonic conduction: Conduction (electrical)

Implementation Method 2

The separator may be doped near the second electrode with second ions having a second charge that opposes the first charge... A difference between the first work function and the second work function may cause an electric field between the first electrode and the second electrode that opposes the voltage applied between the first electrode and the second electrode

Methodology Applied
Scientific EffectElectric field: Electric Field

Implementation Method 3

The separator may include germanium telluride

Methodology Applied
Scientific EffectMixed ionic-electronic conduction: Conduction (electrical)

Data Source

PatentUS11856879B2MIEC and tunnel-based selectors with improved rectification characteristics and tunability
Publication Date: 2023.12.26 APPLIED MATERIALS INC
  • US11856879B2 patent drawing
  • US11856879B2 patent drawing
  • US11856879B2 patent drawing

AI summary

A selector device for a memory cell in a memory array may include a first electrode, and a separator that include a first region of a single-composition layer of a mixed ionic-electronic conduction material with a first concentration of defects; and a second region of a single-composition layer of a transitional metal oxide with a second concentration of defects that is different from the first concentration of defects. The selector device may also include a second electrode, where the separator is between the first electrode and the second electrode.