MIM Capacitor Heat Sink Structure for High-Frequency Power Amplifiers

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Solution Overview

Problem

In high-frequency operation of power amplifiers, the limited space generates excessive heat, which can impair the normal operation of the power amplifier.

Innovation Solution

A structure of a metal-insulator-metal (MIM) capacitor and a heat sink is designed with a dielectric layer having a capacitor region and a heat dispensing region. A first heat conductive layer covers the dielectric layer, and a second heat conductive layer contacts both the capacitor dielectric layer and the first heat conductive layer. A top electrode covers the second heat conductive layer, and heat sinks are positioned to facilitate heat dissipation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If power amplifier operates at high frequency in limited space, then signal amplification performance is improved, but heat generation increases causing overheating

Engineering Contradiction:
Improvesignal amplification performanceVSAvoidheat generation
Core Design Contradiction:
PowerVSTemperature

Solution Approach 1:

The heat dissipation system is segmented into multiple heat sinks (first heat sink contacting top electrode, second heat sink contacting heat conductive layers) distributed in the heat dispensing region, allowing heat to be dissipated through multiple separate pathways rather than a single point, effectively reducing localized overheating while maintaining high-frequency operation

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Heat conductive layers (first and second heat conductive layers) are introduced as intermediary elements between the capacitor structure and heat sinks. These layers facilitate efficient thermal transfer from the capacitor electrodes and dielectric to the heat sinks, acting as thermal mediators that enable effective heat removal without interfering with the electrical function of the capacitor

Inventive Principle:
Principle #24Intermediary (Mediator)

2Temperature

If heat conductive layers and multiple heat sinks are added to dissipate heat, then heat dissipation capability is improved, but device structure becomes more complex

Engineering Contradiction:
Improveheat dissipation capabilityVSAvoidstructure complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The heat conductive layers serve dual functions: they provide thermal conduction pathways to heat sinks while also acting as structural support layers and potential electrical shielding layers within the capacitor structure. This multi-functionality reduces the need for additional dedicated components, thereby limiting the increase in structural complexity despite enhanced heat dissipation capabilities

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design effectively dissipates heat away from the power amplifier, preventing overheating and ensuring stable operation under high-frequency conditions.

Implementation Method 1

a first heat conductive layer covers the dielectric layer and the heat dispensing region... a second heat conductive layer covers and contacts the capacitor dielectric layer and the first heat conductive layer

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS20250038103A1Structure of MIM capacitor and heat sink
Publication Date: 2025.01.30 UNITED MICROELECTRONICS CORP
  • US20250038103A1 patent drawing
  • US20250038103A1 patent drawing
  • US20250038103A1 patent drawing

AI summary

A structure of an MIM capacitor and a heat sink include a dielectric layer. The dielectric layer includes a capacitor region and a heat dispensing region. A bottom electrode is embedded in the dielectric layer. A first heat conductive layer covers the dielectric layer. A capacitor dielectric layer is disposed on the first heat conductive layer within the capacitor region. A second heat conductive layer covers and contacts the capacitor dielectric layer and the first heat conductive layer. A top electrode is disposed within the capacitor region and the heat dispensing region and covers the second heat conductive layer. A first heat sink is disposed within the heat dispensing region and contacts the top electrode. A second heat sink is disposed within the heat dispensing region and contacts the first heat conductive layer and the second heat conductive layer.