1T1C Memory Cell With MIM Capacitor Breakdown

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Solution Overview

Problem

Current memory cell technologies, such as those using gate oxide anti-fuses and metal fuses, face challenges with larger chip area occupation, higher program voltage requirements, reliability concerns, and scalability issues at advanced process nodes, while also compromising data security.

Innovation Solution

A memory cell with a one-transistor-one-capacitor (1T1C) configuration utilizing a metal-insulator-metal (MIM) capacitor, where the insulating material breaks down under a predetermined voltage, allowing for smaller chip area, lower program voltage, and improved reliability by storing data as logic '0' or '1' based on the capacitor's state.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If gate oxide anti-fuses or metal fuses are used for memory cells, then data security is compromised, but chip area occupation increases and program voltage requirements increase

Engineering Contradiction:
Improvedata securityVSAvoidchip area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent changes the electrical parameters of the memory cell by using a 1T1C configuration with a MIM capacitor having a breakdown voltage of 1.2V or less, compared to traditional anti-fuse technologies that require higher voltages. This parameter change enables lower program voltage operation while maintaining data security through the capacitor's breakdown state to store data.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent transitions from planar memory cell layouts to a three-dimensional stacked configuration where the capacitor is positioned over the transistor in the vertical dimension. This dimensional change reduces the lateral chip area occupied by each memory cell while maintaining the necessary electrical isolation and functionality.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If gate oxide anti-fuses or metal fuses are used for memory cells, then data security is compromised, but program voltage requirements increase

Engineering Contradiction:
Improvedata securityVSAvoidprogram voltage
Core Design Contradiction:
ReliabilityVSPower

Solution Approach 1:

The patent changes the electrical parameters of the memory cell by using a 1T1C configuration with a MIM capacitor having a breakdown voltage of 1.2V or less, compared to traditional anti-fuse technologies that require higher voltages. This parameter change enables lower program voltage operation while maintaining data security through the capacitor's breakdown state to store data.

Inventive Principle:
Principle #35Parameter changes

3Adaptability or versatility

If traditional memory cell technologies are used, then scalability at advanced process nodes is limited, but chip area occupation increases

Engineering Contradiction:
Improvescalability at advanced process nodesVSAvoidchip area
Core Design Contradiction:
Adaptability or versatilityVSArea of stationary object

Solution Approach 1:

The patent transitions from planar memory cell layouts to a three-dimensional stacked configuration where the capacitor is positioned over the transistor in the vertical dimension. This dimensional change reduces the lateral chip area occupied by each memory cell while maintaining the necessary electrical isolation and functionality, enabling better scalability at advanced process nodes.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent segments the memory cell into distinct functional components (transistor and capacitor) that can be independently optimized and manufactured. The capacitor is formed as a separate MIM structure that can be integrated at different stages of the manufacturing process, allowing for flexible adaptation to various process nodes and improving overall scalability.

Inventive Principle:
Principle #1Segmentation

4Reliability

If traditional memory cell technologies are used, then reliability concerns arise, but chip area occupation increases

Engineering Contradiction:
ImprovereliabilityVSAvoidchip area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent employs a composite structure combining a transistor with a MIM (metal-insulator-metal) capacitor to form the memory cell. The MIM capacitor uses layered materials with specific electrical properties, including an insulating layer with controlled breakdown characteristics, to achieve reliable data storage. This composite approach improves reliability through the stable electrical characteristics of the MIM structure while reducing the required chip area compared to traditional technologies.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The 1T1C configuration achieves a significant reduction in chip area, lower program voltage, enhanced reliability, and improved data security, making it suitable for advanced process nodes and addressing the limitations of existing technologies.

Implementation Method 1

the insulating material breaks down under a predetermined voltage, allowing for smaller chip area, lower program voltage, and improved reliability by storing data as logic '0' or '1' based on the capacitor's state

Methodology Applied
Scientific EffectBreakdown voltage: Avalanche Breakdown

Data Source

PatentUS11501051B2Memory device, integrated circuit device and method
Publication Date: 2022.11.15 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11501051B2 patent drawing
  • US11501051B2 patent drawing
  • US11501051B2 patent drawing

AI summary

A memory device includes at least one bit line, at least one word line, and at least one memory cell comprising a capacitor and a transistor. The transistor has a gate terminal coupled to the word line, a first terminal, and a second terminal. The capacitor has a first end coupled to the first terminal of the transistor, a second end coupled to the bit line, and an insulating material between the first end and the second end. The insulating material is configured to break down under a predetermined break-down voltage or higher applied between the first end and the second end.