MIM Junction Plasmonic Transducer Direct Tunneling

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Solution Overview

Problem

Existing on-chip plasmon excitation and detection methods are inefficient for high-speed integrated circuits due to indirect processes and low electron-to-photon and photon-to-electron conversion efficiencies, lacking a structure that can both generate and detect plasmons directly with practical efficiencies.

Innovation Solution

A metal-insulator-metal (MIM) junction with a first metal wire, a tunneling barrier, and a second metal wire forms a plasmonic waveguide, enabling direct plasmon generation and detection through quantum mechanical tunneling, achieving efficiencies of 10-20% plasmon excitation and detection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If miniaturized semiconductors are used for plasmon excitation or detection, then device size is reduced, but conversion efficiency deteriorates due to indirect electron-hole pair generation

Engineering Contradiction:
Improvedevice sizeVSAvoidconversion efficiency
Core Design Contradiction:
Volume of moving objectVSLoss of energy

Solution Approach 1:

The patent extracts and eliminates the intermediate semiconductor material and electron-hole pair generation step from the plasmon excitation process. By using a direct metal-to-metal tunnel junction structure, the system bypasses the inefficient semiconductor conversion process and achieves direct electron-to-plasmon conversion, thereby resolving the contradiction between miniaturization and efficiency.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent introduces a thin insulator layer as a quantum tunneling barrier between two metal electrodes. This intermediary structure enables direct electron tunneling and plasmon generation without requiring semiconductor materials, achieving both miniaturization and high conversion efficiency by mediating the energy transfer process through quantum mechanical tunneling.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Device complexity

If existing direct plasmon generation methods are used, then device structure is simplified, but electron-to-photon conversion efficiency deteriorates to 10^-4-10^-7

Engineering Contradiction:
Improvedevice structureVSAvoidelectron-to-photon conversion efficiency
Core Design Contradiction:
Device complexityVSLoss of energy

Solution Approach 1:

The patent changes the operating parameters by applying high bias voltages (0.5-2.0 V) across the metal-insulator-metal junction, which enables inelastic electron tunneling and plasmon generation. By optimizing the insulator barrier thickness (1-5 nm) and material composition, the system achieves high conversion efficiency while maintaining structural simplicity.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite material structures combining different metals (e.g., Al/AlOx/Au, Ag/AlOx/Al) with precisely controlled insulator barriers. This composite approach optimizes both the tunneling probability and plasmon generation efficiency, achieving high conversion efficiency without increasing device complexity.

Inventive Principle:
Principle #40Composite materials

3Ease of manufacture

If existing plasmon detection methods are used, then device fabrication is simplified, but photon-to-electron conversion efficiency deteriorates

Engineering Contradiction:
Improvedevice fabricationVSAvoidphoton-to-electron conversion efficiency
Core Design Contradiction:
Ease of manufactureVSLoss of energy

Solution Approach 1:

The patent designs a universal metal-insulator-metal junction structure that can function both as a plasmon source and a plasmon detector. The same device structure achieves high efficiency in both generation and detection modes by utilizing the reversible nature of the tunneling process, thereby improving detection efficiency without complicating fabrication.

Inventive Principle:
Principle #6Universality (Multi-functionality)

4Adaptability or versatility

If separate structures are used for plasmon generation and detection, then each function can be optimized independently, but overall device efficiency deteriorates due to additional conversion steps

Engineering Contradiction:
Improvefunctional optimizationVSAvoidoverall conversion efficiency
Core Design Contradiction:
Adaptability or versatilityVSLoss of energy

Solution Approach 1:

The patent merges the plasmon generation and detection functions into a single integrated metal-insulator-metal junction structure. By combining these functions in one device, the system eliminates intermediate conversion steps and achieves high overall efficiency while maintaining the ability to optimize each function through bias configuration.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The MIM junction allows for high-efficiency plasmon generation and detection, increasing efficiency by 103-106 times over previous approaches, suitable for high-speed integrated circuits and applications like frequency multipliers and amplifiers.

Implementation Method 1

a source current flows therebetween via quantum mechanical tunneling, and the MIM junction propagates SPPs along the plasmonic waveguide

Methodology Applied
Scientific EffectQuantum mechanical tunneling:

Implementation Method 2

a response current is produced between the wires of the MIM junction in response to received SPPs along the plasmonic waveguide

Methodology Applied
Scientific EffectQuantum mechanical tunneling:

Data Source

PatentUS10254479B2Highly efficent on-chip direct electronic-plasmonic transducers
Publication Date: 2019.04.09 NATIONAL UNIVERSITY OF SINGAPORE
  • US10254479B2 patent drawing
  • US10254479B2 patent drawing
  • US10254479B2 patent drawing

AI summary

In one embodiment, an on-chip electronic-plasmonic transducer is provided that is capable of both direct plasmon generation and detection at high efficiencies. The electronic-plasmonic transducer includes a metal-insulator-metal junction formed from a first wire constructed of a first metal, a tunneling barrier material in contact with the first wire, and a second wire made from a second metal in contact with the tunneling barrier material. A plasmonic waveguide is formed as a contiguous part of the second wire, such that the waveguide is directly coupled to the MIM junction. The electronic-plasmonic transducer can both directly generate and detect plasmons, such that it may be configured on-chip as either a plasmon source or a plasmon detector. The electronic-plasmonic transducer may be used to form an on-chip plasmon-based frequency multiplier or plasmon amplifier, among other usages.