Automated Mineralogy Electron Microscope Autofocus Working Distance

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Solution Overview

Problem

Automated mineralogy systems face challenges in accurately differentiating between minerals with similar chemical formulas, such as hematite and magnetite, due to their similar x-ray spectra and brightness in backscattered electron images.

Innovation Solution

The method involves using an electron microscope with an autofocus feature to maintain a consistent working distance between the sample and the backscattered electron detector, allowing for enhanced grayscale differentiation between minerals through adjusted contrast and brightness settings, thereby improving the discrimination between similar mineral phases.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If x-ray spectroscopy is used to determine mineral composition, then accurate elemental identification is achieved, but analysis time becomes excessively long

Engineering Contradiction:
Improvemineral composition identification accuracyVSAvoidspectrum accumulation time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The analysis process is divided into two stages: first, rapid backscattered electron imaging provides initial mineral phase segmentation and identification; second, focused x-ray spectroscopy is applied only to specific regions of interest. This segmentation of the analytical process reduces overall analysis time while maintaining accuracy for key minerals.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Instead of performing complete x-ray spectral analysis on all sample areas, the system applies partial action by using backscattered electron detection for preliminary screening and applying x-ray spectroscopy only where needed for confirmatory analysis or quantitative measurement, thereby reducing total measurement time.

Inventive Principle:
Principle #16Partial or excessive action

2Productivity

If backscattered electron detection is used for rapid imaging, then analysis speed increases, but ability to differentiate minerals with similar brightness decreases

Engineering Contradiction:
Improveanalysis speedVSAvoidmineral differentiation capability
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The system merges two detection methods: backscattered electron detection provides rapid imaging and initial mineral phase identification, while x-ray spectroscopy provides detailed compositional analysis. By combining these methods in sequence, the system achieves both rapid screening and accurate differentiation of minerals with similar backscattered electron brightness.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

Backscattered electron imaging serves as an intermediary step between sample preparation and detailed x-ray spectral analysis. It provides a rapid overview that guides subsequent focused x-ray analysis, enabling efficient differentiation of minerals that would be difficult to distinguish by either method alone.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of operation

If working distance varies in electron microscope, then focus adjustment is needed, but grayscale values for backscattered electrons become inconsistent

Engineering Contradiction:
Improvefocus adjustment flexibilityVSAvoidgrayscale value consistency
Core Design Contradiction:
Ease of operationVSMeasurement precision

Solution Approach 1:

The system incorporates feedback mechanisms where the detected backscattered electron signal is used to automatically adjust focus and working distance settings. This feedback loop maintains consistent grayscale values across different sample areas by dynamically compensating for working distance variations, eliminating the need for manual focus adjustment while preserving measurement consistency.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables more accurate and reliable identification of mineral compositions by enhancing the contrast between minerals with similar chemical formulas, improving the precision of mineral analysis in automated mineralogy systems.

Implementation Method 1

Backscattered electrons are typically detected by a solid state detector in which each backscattered electron is amplified as it creates many electron-hole pairs in a semiconductor detector

Methodology Applied
Scientific EffectBackscattered electron emission: Scattering

Implementation Method 2

One energy loss mechanism includes transferring the electron energy to an inner shell electron, which can be ejected from the atom as a result. An outer shell electron will then fall into the inner shell, and a characteristic x-ray may be emitted

Methodology Applied
Scientific EffectCharacteristic x-ray emission: X-Ray

Implementation Method 3

Emitted background or bremsstrahlung radiation x-rays are spread over a wide range of frequencies and can obscure characteristic x-ray peaks

Methodology Applied
Scientific EffectBremsstrahlung radiation: Electromagnetic Induction

Data Source

PatentEP2939008B1Process for performing automated mineralogy
Publication Date: 2017.09.06 FEI CO
  • EP2939008B1 patent drawingFigure 1~2
  • EP2939008B1 patent drawingFigure 3~4
  • EP2939008B1 patent drawingFigure 5

AI summary

A method and system for determining the mineral content of a sample using an electron microscope. The method includes directing an electron beam toward an area of interest of a sample, the area of interest comprising an unknown composition of minerals. The working distance between the backscattered electron detector of the microscope and the area of interest of the sample is determined. Compensation is made for the difference between the working distance and a predetermined working distance in which the predetermined working distance being the working distance that provides desired grayscale values for detected backscattered electrons. One way of compensating for working distance variation is to used an autofocus feature of the microscope to adjust the working distance. Backscattered electrons from the area of interest of the sample are then detected.