Miniature Fluid Control Device Using Piezoelectric Actuation

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Solution Overview

Problem

Conventional pneumatic devices are bulky and noisy, making them unsuitable for miniaturization and portable applications, as they fail to meet the requirements of being small, silent, and efficient for use in sectors like pharmaceutical and energy industries.

Innovation Solution

A miniature fluid control device is designed with a piezoelectric ceramic plate and resonance plate configuration that generates a pressure gradient for high-speed gas flow, allowing for efficient gas transmission while being compact and silent, by stacking a gas inlet plate, resonance plate, and piezoelectric actuator with a gap forming a first chamber for vibration-driven gas flow.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If conventional motors or pressure valves are used in pneumatic devices, then the device can transfer gases effectively, but the device becomes bulky and noisy

Engineering Contradiction:
Improvegas transfer speedVSAvoiddevice volume
Core Design Contradiction:
SpeedVSVolume of moving object

Solution Approach 1:

The patent replaces conventional motors and pressure valves with a piezoelectric actuator that utilizes piezoelectric ceramic plates to generate mechanical motion through electrical excitation. This substitution eliminates bulky mechanical components while maintaining effective gas transfer capability, directly resolving the contradiction between transfer speed and device volume.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the operating parameters by using high-frequency electrical excitation of the piezoelectric ceramic plate (operating at resonance frequency) to generate rapid mechanical vibrations. This parameter change enables compact device design while achieving effective gas transfer speeds, as the high-frequency vibrations produce sufficient pressure gradients in a much smaller volume compared to conventional low-frequency mechanical systems.

Inventive Principle:
Principle #35Parameter changes

2Speed

If conventional motors or pressure valves are used in pneumatic devices, then the device can transfer gases effectively, but the device generates annoying noise

Engineering Contradiction:
Improvegas transfer speedVSAvoidnoise
Core Design Contradiction:
SpeedVSObject-generated harmful factors

Solution Approach 1:

The patent replaces noisy mechanical motors and pressure valves with a piezoelectric actuator system that operates silently or with minimal acoustic output. The piezoelectric ceramic plate converts electrical energy directly to mechanical motion without the noisy moving parts, bearings, and mechanical linkages found in conventional systems, thereby eliminating the harmful noise while maintaining gas transfer effectiveness.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Productivity

If the piezoelectric ceramic plate and suspension plate dimensions are not optimized, then the device structure is simple, but the gas flow efficiency and pressure gradient generation are insufficient

Engineering Contradiction:
Improvegas flow efficiencyVSAvoidstructure complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent optimizes specific dimensional parameters of the piezoelectric ceramic plate (thickness, lateral dimensions) and suspension plate to achieve resonance at a specific frequency, maximizing the pressure gradient generation and gas flow efficiency. By carefully selecting these parameters, the device achieves high productivity without requiring complex structural modifications, as the optimization is achieved through parameter tuning rather than structural complexity.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device achieves high-speed gas transmission with reduced noise and size, enabling its use in portable equipment, such as medical and industrial applications, with a slim and portable design that maintains efficient gas pressure management.

Implementation Method 1

When a piezoelectric ceramic plate is operated at a high frequency, a pressure gradient is generated in the fluid channels of the miniature fluid control device to facilitate the gas to flow at a high speed

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

the resonance plate and the piezoelectric actuator are stacked on each other sequentially. A gap is formed between the resonance plate and the piezoelectric actuator to define a first chamber. When the piezoelectric actuator is actuated, the gas is fed into the miniature fluid control device through the at least one inlet of the gas inlet plate, converged to the central cavity through the at least one convergence channel, transferred through the central aperture of the resonance plate

Methodology Applied
Scientific EffectResonance: Resonance

Data Source

PatentEP3333423B1Miniature fluid control device
Publication Date: 2022.05.11 MICROJET TECH
  • EP3333423B1 patent drawingFigure 1A
  • EP3333423B1 patent drawingFigure 1B
  • EP3333423B1 patent drawingFigure 2A

AI summary

A miniature fluid control device (1A) includes a gas inlet plate (11), a resonance plate (12) and a piezoelectric actuator (13). The gas inlet plate (11) includes an inlet (110), a convergence channel (112) and a central cavity (111). A convergence chamber is defined by the central cavity (111). The resonance plate (12) has a central aperture (120). The piezoelectric actuator (13) includes a suspension plate (130), an outer frame (131) and a piezoelectric ceramic plate (133). A gap (g0) is formed between the resonance plate (12) and the piezoelectric actuator (13) to define a first chamber (121). The gas is fed into the miniature fluid control device (1A) through the inlet (110) of the gas inlet plate (11), converged to the central cavity (111) through the convergence channel (112), transferred through the central aperture (120) of the resonance plate (12), introduced into the first chamber (121), transferred downwardly through a vacant space (135) between the bracket (132) of the piezoelectric actuator (13), and exited from the miniature fluid control device (1A).