Miniature Motor Electrode Design for Ultrahigh Speed Uniformity

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Solution Overview

Problem

Current miniature motor technologies face challenges in achieving ultrahigh and uniform speed due to limitations in electrode design and fabrication methods, leading to periodic rotational fluctuations and reduced durability.

Innovation Solution

A novel electrode design featuring two sets of quadrupole electrodes with wide and narrow gaps, respectively, for efficient assembly and actuation of miniature motors, combined with a method of forming miniature rotors and magnets using a dissolvable layer and etching process, allowing for perpendicular magnetic configurations and robust materials like Ti and diamond thin films.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional electrode design and fabrication methods are used, then manufacturing simplicity is maintained, but rotation speed uniformity deteriorates due to periodic rotational fluctuations

Engineering Contradiction:
Improverotation speed uniformityVSAvoidelectrode design complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The electrode system is divided into two distinct sets: a first set of quadrupole electrodes with wide gaps for assembly, and a second set with narrow gaps for actuation. This segmentation allows each electrode set to be optimized for its specific function, resolving the contradiction between manufacturing simplicity and rotation speed uniformity by eliminating periodic rotational fluctuations through specialized narrow-gap actuation electrodes.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the electrode system are given different properties: the first set of electrodes has wide gaps suitable for manipulation and assembly operations, while the second set has narrow gaps optimized for high-speed actuation. This local differentiation enables uniform rotation speed during operation while maintaining ease of assembly during manufacturing.

Inventive Principle:
Principle #3Local quality

2Manufacturing precision

If conventional fabrication methods are used, then manufacturing cost is kept low, but manufacturing precision deteriorates due to inability to form perpendicular magnetic configurations

Engineering Contradiction:
Improvemagnetic configuration precisionVSAvoidfabrication process complexity
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

A dissolvable layer is deposited on the substrate before forming the magnetic structures. This preliminary action creates a template that guides the precise formation of perpendicular magnetic configurations (in-plane magnetization in the substrate, out-of-plane magnetization in the dots). After fabrication, the dissolvable layer is removed, leaving the precisely configured magnetic structures without requiring complex in-situ patterning.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The dissolvable layer serves as an intermediary medium during fabrication. It enables the formation of perpendicular magnetic configurations by providing a temporary structural guide that simplifies the deposition process. Once the magnetic dots and substrates are properly configured, the intermediary layer is removed, achieving high precision magnetic alignment without complex fabrication steps.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If robust materials like Ti and diamond thin films are used, then durability is improved, but manufacturing complexity increases due to additional deposition steps

Engineering Contradiction:
Improvemotor durabilityVSAvoidfabrication process steps
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The fabrication process utilizes changes in material parameters (solubility) to simplify manufacturing. By selecting a dissolvable layer with specific solubility characteristics, the process enables easy removal after serving its structural guidance function. This parameter-based approach allows incorporation of robust materials like Ti and diamond thin films while managing fabrication complexity through intelligent process design rather than simply adding steps.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables miniature motors to achieve ultrahigh speeds of up to 18,000 rpm with significantly improved rotation speed uniformity and durability, capable of millions of rotations without failure, and facilitates the use of diatom frustules as rotors for enhanced performance in nanoscale applications.

Implementation Method 1

A novel electrode design featuring two sets of quadrupole electrodes with wide and narrow gaps, respectively, for efficient assembly and actuation of miniature motors

Methodology Applied
Scientific EffectElectromagnetic actuation: Electromagnetic Induction

Implementation Method 2

dissolving the dissolvable layer with a solvent to expose the miniature dots, miniature disks or miniature cylinders

Methodology Applied
Scientific EffectDissolution: Solvation

Implementation Method 3

etching an array of nanoholes in the substrate

Methodology Applied
Scientific EffectEtching:

Implementation Method 4

depositing one or more metallic layers into the nanoholes to form an array of miniature dots, miniature disks or miniature cylinders

Methodology Applied
Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Data Source

PatentUS10944339B2Electrode design and low-cost fabrication method for assembling and actuation of miniature motors with ultrahigh and uniform speed
Publication Date: 2021.03.09 BOARD OF RGT THE UNIV OF TEXAS SYST
  • US10944339B2 patent drawing
  • US10944339B2 patent drawing
  • US10944339B2 patent drawing

AI summary

The invention includes miniature dots, miniature disks or miniature cylinders and methods of making the same by dispersing a particle in or on a dissolvable, meltable or etchable layer on a substrate, a portion of the particle exposed above a surface of the dissolvable, meltable or etchable layer; depositing a mask on the particles and the dissolvable substrate; removing the particles from the layer; etching an array of nanoholes in the substrate; depositing one or more metallic layers into the nanoholes to form an array of dots, disks or cylinders; and dissolving the dissolvable layer with a solvent to expose the dots, disks or cylinders. The dots, disks or cylinders can be included with two sets of microelectrodes for ultrahigh speed rotation of miniature motors, and/or can be designed with a magnetic configuration into miniature motors for uniform rotation speeds and prescribed angular displacement. The invention also includes modified diatom frustules, and miniature motors containing modified diatom frustules.