Miniaturized Broadband Electrical Substitution Radiometer

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Solution Overview

Problem

Conventional broadband electrical substitution radiometers are macroscopic and unsuitable for miniaturization and integration into focal plane arrays, limiting their application in broadband absolute radiometry.

Innovation Solution

A broadband electrical substitution radiometer is designed with a substrate, isolation layer, thermal isolation platform, thermal isolation support beam, thermal isolation island, electrical thermometer-heater, electrical lead, and optical absorber, enabling miniaturization and integration into arrays while maintaining broadband operation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional electrical substitution radiometers are used, then accurate measurement of incident radiation power is achieved, but the device size becomes macroscopic and complex, making miniaturization and array integration impossible

Engineering Contradiction:

Improvemeasurement accuracyVSAvoiddevice size

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The conventional radiometer is segmented into discrete functional layers (substrate, isolation layer, thermal isolation platform, thermal isolation support beam, thermal isolation island, electrical thermometer-heater, and optical absorber) that can be independently fabricated and integrated, enabling miniaturization while preserving measurement accuracy

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The radiometer transitions from a macroscopic three-dimensional structure to a planar two-dimensional layered structure that can be integrated into focal plane arrays, maintaining measurement precision through careful design of thermal isolation and electrical connections in the planar configuration

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Measurement precision

If thermal isolation is enhanced to improve measurement sensitivity, then measurement precision improves, but device complexity and fabrication difficulty increase

Engineering Contradiction:

Improvemeasurement sensitivityVSAvoidfabrication difficulty

Core Design Contradiction:

Measurement precisionVSEase of manufacture

Solution Approach 1:

Thermal isolation is achieved through segmentation into distinct thermal isolation layers and support structures that can be fabricated using standard microfabrication techniques, balancing measurement sensitivity with ease of manufacture

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Thermal isolation platforms and support beams act as intermediary structures between the substrate and the sensing elements, providing controlled thermal pathways that enhance measurement sensitivity while remaining compatible with conventional fabrication processes

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The miniaturized broadband electrical substitution radiometer achieves sensitive and accurate measurement of incident radiation power over a broad range of wavelengths, overcoming the limitations of conventional macroscopic radiometers.

Implementation Method 1

an optical absorber disposed on the thermal isolation island for absorbing radiation incident on the broadband electrical substitution radiometer

Methodology Applied

Scientific EffectAbsorption (EM radiation): Absorption (EM radiation)

Implementation Method 2

A thermistor, in thermal communication with the absorber, registers a change in temperature by a change in its electrical resistance

Methodology Applied

Scientific EffectThermistor: Thermistor

Implementation Method 3

electrical power to produce a temperature rise in the detector equivalent to that produced by the absorbed radiation

Methodology Applied

Scientific EffectJoule heating: Joule Heating

Data Source

PatentUS20250102364A1Broadband electrical substitution radiometer, array of same, and performing radiometry

Publication Date: 2025.03.27 THE GOVERNMENT OF THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY DEPARTMENT OF HEALTH & HUMAN SERVICES

AI summary

A broadband electrical substitution radiometer includes a substrate, an isolation layer disposed on the substrate, an electrical thermometer-heater disposed on the isolation layer, an electrical lead in electrical communication with the electrical thermometer-heater, selective removal of the substrate to form a suspended isolation layer, and an optical absorber disposed on the isolation layer. The isolation layer comprises a thermal isolation platform, a thermal isolation support beam, and a thermal isolation island. The electrical thermometer-heater is disposed on the thermal isolation island and detects a change in temperature and controllably heats the isolation layer. The electrical lead receives a signal from and provides power to the electrical thermometer-heater. The optical absorber absorbs radiation incident on the radiometer.