Miniaturized Gas Cell for MEMS Integration
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Solution Overview
Problem
Existing gas cells used in fluid analyzers are not adequately miniaturized, which limits their compatibility with micro-electro-mechanical-systems (MEMS) technology and hinders integration with sensors and other components.
Innovation Solution
The development of miniaturized gas cells fabricated using semiconductor technology, which include a bottom surface and sidewalls formed in a substrate, coated with reflective materials or silicon Bragg mirrors, and integrated with gas inlets, outlets, optical inputs, and outputs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If conventional gas cells are used in fluid analyzers, then adequate detection performance is achieved, but miniaturization is insufficient and compatibility with MEMS technology is limited
Solution Approach 1:
The patent transitions from conventional bulk gas cell designs to planar integrated gas cell structures fabricated on semiconductor substrates. By changing the dimensional approach from three-dimensional bulk components to two-dimensional planar integration, the gas cell achieves miniaturization while maintaining detection performance through optimized light paths and reflective surfaces within the planar geometry.
Solution Approach 2:
The patent replaces traditional mechanical gas cell assemblies with semiconductor-based integrated structures. By substituting mechanical fabrication methods with semiconductor manufacturing processes, the gas cell achieves precise dimensional control, improved miniaturization, and enhanced compatibility with MEMS technology while preserving optical detection functionality.
2Adaptability or versatility
If gas cells are miniaturized to enhance MEMS compatibility, then integration with sensors and other components is enabled, but manufacturing complexity increases
Solution Approach 1:
The patent integrates the gas cell structure with sensor components and other functional elements into a single unified device fabricated on the same semiconductor die. By merging previously separate components into one integrated structure, the design enables enhanced adaptability and versatility while leveraging standard semiconductor manufacturing processes to manage complexity.
Solution Approach 2:
The patent designs the integrated gas cell to perform multiple functions within a single structure, including gas containment, light guidance, sensing, and integration with other components. This multi-functional approach enhances versatility and integration capability while utilizing common manufacturing processes for all functions, thereby controlling overall manufacturing complexity.
3Productivity
If conventional gas cell fabrication methods are used, then manufacturing is straightforward, but mass production and integration with other components are hindered
Solution Approach 1:
The patent replaces conventional mechanical fabrication methods with semiconductor manufacturing processes. This substitution enables mass production through standardized, scalable semiconductor fabrication techniques while maintaining ease of manufacture by utilizing well-established, automated semiconductor manufacturing workflows that are optimized for high-volume production.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the miniaturization of gas cells, enhancing their compatibility with MEMS technology, allowing for integration with sensors and other components, and facilitating mass production of integrated devices for fluid analysis.
Implementation Method 1
The bottom surface and/or sidewalls may be coated with a reflective material, such as a metal or dielectric coated metal. In other examples, the bottom surface and/or sidewalls may include silicon Bragg mirrors. The light may be guided in the gas cell by at least the bottom surface and the sidewalls.
Data Source
AI summary
Aspects relate to a miniaturized gas cell that may be implemented into an integrated device for gas analysis. The miniaturized gas cell may be a multi-pass gas cell or a hollow waveguide gas cell. In some aspects, the miniaturized gas cell may include a bottom surface and sidewalls formed in a substrate (e.g., a silicon substrate or silicon on insulator (SOI) substrate). The gas cell further includes at least one gas inlet and at least one gas outlet coupled for injection of a gas into and out of the gas cell, respectively. In addition, the gas cell further includes an optical input and an optical output, each optically coupled to direct light into and out of the gas cell, respectively. In addition, a capping layer may be bonded to the substrate to form a top surface of the gas cell.