MIR Imaging System Automatic Referencing

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing MIR imaging systems require frequent removal and replacement of samples for reference measurements, which is time-consuming and often avoided due to user interaction requirements and costly purge systems, leading to sub-optimal scanning results and reduced frequency of reference updates.

Innovation Solution

A MIR imaging apparatus and method that allows for reference samples to be scanned without disturbing the actual sample, using a tunable MIR laser, a specimen stage, and an optical assembly with a moving mirror to maintain focus while a reference stage with varying reflectivities and chemical compositions is integrated into the system, enabling continuous imaging without sample removal.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If reference measurements are performed by removing and replacing samples, then reference accuracy is improved, but productivity deteriorates due to time-consuming sample handling

Engineering Contradiction:
Improvereference measurement accuracyVSAvoidscanning speed
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The system divides the imaging area into two independent segments: a specimen stage for sample imaging and a reference stage for reference measurements. The reference stage can be independently accessed by the scanning mirror without disturbing the specimen stage, allowing reference measurements to be performed without removing or replacing the sample, thus maintaining both accuracy and productivity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The reference stage acts as an intermediary element that provides reference measurements without requiring direct interaction with the specimen. The scanning mirror can switch between imaging the specimen and measuring the reference sample, enabling frequent reference updates without interrupting the overall imaging workflow

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If reference measurements are performed frequently, then measurement precision is improved, but loss of time increases due to sample removal and replacement

Engineering Contradiction:
Improveimage accuracyVSAvoidscanning time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The reference sample is pre-positioned on the reference stage and prepared in advance. The scanning mirror can quickly switch to the reference stage for measurements without requiring any sample preparation or handling during the imaging process, eliminating time losses associated with frequent sample changes

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system maintains continuous imaging operation by allowing reference measurements to be performed on the reference stage without interrupting the specimen imaging. The scanning mirror alternates between the specimen and reference stages, ensuring that useful imaging action continues without interruption while still performing frequent reference measurements

Inventive Principle:
Principle #20Continuity of useful action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables efficient and frequent reference measurements without disturbing the sample, improving image resolution and reducing scanning time by allowing for periodic reference scans and background subtraction, thus enhancing the accuracy and speed of MIR imaging.

Implementation Method 1

a tunable MIR laser that generates a light beam

Methodology Applied
Scientific EffectLaser: Laser

Implementation Method 2

An optical assembly focuses the light beam to a point on the specimen. The optical assembly includes a scanning assembly having a focusing lens that focuses the light beam to a point on the specimen

Methodology Applied
Scientific EffectFocusing: Focusing

Implementation Method 3

a mirror that moves in a second direction relative to the stage such that the focusing lens maintains a fixed distance between the focusing lens and the specimen stage

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 4

measuring the absorption of MIR light at various locations on a sample can provide useful information about the chemistry of the sample as a function of position on the sample

Methodology Applied
Scientific EffectAbsorption Spectroscopy: Absorption Spectroscopy

Data Source

PatentEP3431963B1Infrared imaging system with automatic referencing
Publication Date: 2023.01.11 AGILENT TECHNOLOGIES INC
  • EP3431963B1 patent drawingFigure 1
  • EP3431963B1 patent drawingFigure 2

AI summary

A method and apparatus for obtaining reference samples during the generation of a mid-infrared (MIR) image without requiring that the sample being imaged be removed is disclosed. A tunable MIR laser (11) generates a light beam (18) that is focused onto a specimen (16) on a specimen stage (57) that moves the specimen in a first direction (33). An optical assembly includes a scanning assembly (31) having a focusing lens (55) and a mirror (56) that moves in a second direction (32), different from the first direction, relative to the stage (57) such that the focusing lens maintains a fixed distance between the focusing lens and the specimen stage. A light detector (13) measures an intensity of light leaving the point on the specimen. A controller (39) forms an image from the measured intensity. A reference stage (61) is positioned such that the mirror moves over the reference stage in response to a command so that the controller can also make a reference measurement.