Electromagnetic Mirror Array for Beam Phase Control
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Solution Overview
Problem
Existing optical components for guiding radiation beams lack the ability to precisely control the direction and phase of reflected light, particularly in applications requiring flexible adjustment of mirror elements for accurate beam focusing and incidence angles on curved surfaces.
Innovation Solution
A two-dimensional mirror array with electromagnetic actuators that allow for both tilting and linear displacement of mirror elements, enabling precise control of the direction and phase of reflected light by adjusting the tilt angle and height of mirror elements, and using a control device for integrated and space-saving actuation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If mirror elements are only tilted without linear displacement capability, then the device complexity is reduced, but the beam direction and phase control precision deteriorates
Solution Approach 1:
The mirror array is segmented into individual mirror elements, each with independent electromagnetic actuators that provide both tilt and linear displacement capabilities. This segmentation allows precise control of each element's position and orientation, achieving high beam direction and phase control precision while managing device complexity through modular architecture.
Solution Approach 2:
The electromagnetic actuators are designed to provide multiple functions: both tilting and linear displacement of mirror elements. This multi-functionality eliminates the need for separate mechanisms for each degree of freedom, achieving precise beam control while actually reducing overall device complexity compared to using separate actuators for tilt and displacement.
2Adaptability or versatility
If electromagnetic actuators are used for both tilting and linear displacement, then the adaptability of the optical component improves, but the device complexity increases
Solution Approach 1:
Electromagnetic actuators are employed to provide both tilting and linear displacement functions within a single actuator design. This multi-functional approach significantly enhances the adaptability of the optical component, enabling it to perform various beam steering and focusing operations. The versatility is achieved without proportionally increasing complexity because the same actuator type handles multiple degrees of freedom.
Solution Approach 2:
Traditional mechanical actuation systems (such as piezoelectric actuators or mechanical linkages) are replaced with electromagnetic actuators. This substitution provides more flexible and programmable control, enhancing adaptability while potentially reducing mechanical complexity through contactless actuation and simpler control architectures.
3Manufacturing precision
If the electrode geometry is optimized for linear displacement, then the manufacturing precision of mirror height control improves, but the tilt control capability deteriorates
Solution Approach 1:
The electrode geometry is specifically optimized for the linear displacement function, with electrode arrangements and dimensions tailored to provide precise vertical control of mirror elements. This localized optimization of electrode design for specific functions (displacement vs. tilt) allows high manufacturing precision in mirror height control while maintaining adequate tilt control capability through the overall actuator design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for adjustable focal length and main beam direction, achieving extended depth of focus and precise beam control, enabling effective processing and examination of both planar and curved surfaces with improved accuracy and flexibility.
Implementation Method 1
By generating an electric field whose field strength averaged over the extent of the first electrode has a component in the direction of the normal to the surface, a force acting in the direction of the normal to the surface can be exerted on the mirror element
Implementation Method 2
This makes it possible to control the direction and phase of the reflected light
Data Source
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AI summary
The invention relates to an optical component (52) for guiding at least one radiation beam (10; 135i), comprising a plurality of mirror elements (27) that each have a mirror body (35) having a reflection surface (36) with a central surface normal (340), and comprising a support structure (36) that is mechanically connected to the mirror elements (27), wherein at least one portion of the mirror elements (27) can be linearly displaced relative to the support structure (36) by means of electromagnetic actuators (50) associated with each mirror element in a z-direction which runs parallel to the surface normal (340) of the mirror element (27) in question in a central position, and can be tipped from a central position about at least one tipping axis that is transversally directed towards the surface normal (340), the actuator (50) always comprising at least one first electrode (44) connected to the mirror element (27), and at least one second electrode (62i) connected to the support structure (36), the at least one electrode (62i) which is connected to the support structure (36) having at least one electrode arranged so as to run in the z-direction, the electrodes (44, 62i) being formed and/or arranged such that an electric field can be generated between the electrodes, the average field strength of the electric field along the extension of the first electrode (44) having a component in the z-direction.