EUV Mirror Mediator Layer Capacitive Voltage Interpolation
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Solution Overview
Problem
In EUV microlithography, adaptive mirrors with piezoelectric layers face challenges in compensating for optical aberrations while minimizing thermal effects caused by significant power losses due to electric current flow in the mediator layer.
Innovation Solution
The adaptive mirror incorporates a mediator layer structured as a capacitive voltage divider, with regions electrically insulated from one another, avoiding steady-state current flow and associated power losses.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a mediator layer with low electrical conductivity is used to interpolate voltage between electrodes, then the potential distribution is smoothed, but significant power losses and thermal effects occur due to electric current flow
Solution Approach 1:
The mediator layer is segmented into multiple discrete regions (first mediator layer regions and second mediator layer regions) that are electrically insulated from each other. This segmentation allows each region to be independently controlled, enabling voltage interpolation without requiring continuous current flow through a resistive layer, thereby reducing power losses while maintaining surface shape precision.
Solution Approach 2:
The patent introduces a capacitive mediator layer structure as an intermediary between the electrodes and the piezoelectric layer. This mediator layer acts as a voltage divider that interpolates potentials without requiring steady-state current flow, unlike resistive mediators. The capacitive nature allows voltage distribution while minimizing energy dissipation, solving the contradiction between precision control and energy loss.
2Temperature
If a continuous mediator layer is used for voltage interpolation, then thermal effects are reduced, but steady-state current flow causes power losses in the kW range
Solution Approach 1:
The mediator layer is divided into electrically insulated regions that can be independently controlled. This segmentation transforms the system from requiring continuous current flow to using capacitive voltage division, dramatically reducing steady-state power consumption while maintaining thermal stability through controlled potential distribution.
Solution Approach 2:
The patent changes the electrical parameter of the mediator layer from resistive (continuous current flow) to capacitive (discharge-based voltage interpolation). This parameter change eliminates steady-state current flow and associated power losses while maintaining the voltage interpolation function, thereby reducing both energy consumption and thermal effects.
3Loss of energy
If the mediator layer has high electrical resistance to limit power loss, then thermal effects are minimized, but the propagation of electrical potential becomes too slow
Solution Approach 1:
The patent changes the fundamental electrical parameter of the mediator layer from resistive to capacitive. Capacitive structures respond to voltage changes through displacement current rather than ohmic conduction, enabling rapid potential propagation without steady-state power loss. This parameter change simultaneously improves speed while maintaining low energy consumption.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively interpolates voltage without steady-state current flow, reducing thermal effects and enabling rapid reaction to desired surface shape settings, thus optimizing aberration correction in EUV microlithography.
Implementation Method 1
an actuator layer composed of a piezoelectric material, wherein an electric field having a locally varying strength is generated across this piezoelectric layer by an electrical voltage being applied to electrodes
Implementation Method 2
a reflection layer system for reflecting electromagnetic radiation incident on the optical effective surface
Data Source
AI summary
A mirror including a substrate (110), a reflection layer system (120), and at least one continuous piezoelectric layer (130, . . . ) arranged between the substrate and the layer system. An electric field producing a locally variable deformation is applied to the piezoelectric layer via a first, layer-system-side electrode arrangement and a second, substrate-side electrode arrangement. At least one of the electrode arrangements is assigned a mediator layer (170) setting an at least regionally continuous profile of the electrical potential along the respective electrode arrangement. The electrode arrangement to which the mediator layer is assigned has a plurality of electrodes (160, . . . ), each of which is configured to receive an electrical voltage relative to the respective other electrode arrangement. In the region that couples two respectively adjacent electrodes, the mediator layer is subdivided into a plurality of regions (171, . . . ) that are electrically insulated from one another.