Mirror Micromechanical Structure Cavity Design for Wide Field of View
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Solution Overview
Problem
Mirror micromechanical structures face limitations in achieving a wide field of view due to partial shadowing or clipping of the reflected light beam, especially at higher inclination angles, which affects the optical performance.
Innovation Solution
A mirror micromechanical structure with a cavity in the supporting body is designed to allow unobstructed reflection of light within a desired angular range by shaping the cavity to prevent shadowing, enabling the mobile mass to rotate freely and maintain optical performance across a wide field of view.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the mirror element is set at a wide inclination angle (40°-50°) to achieve compact device dimensions, then the device occupies less space, but the field of view is limited due to shadowing or clipping of the reflected light beam
Solution Approach 1:
The cavity is designed with specific dimensional characteristics (depth and lateral extent) to provide unobstructed space for light beam reflection. By carefully controlling the cavity dimensions, the patent enables wide angular reflection ranges (±45° or greater) without shadowing, effectively using dimensional design to resolve the contradiction between compact size and wide field of view
Solution Approach 2:
The patent optimizes specific parameters including the cavity depth (d), lateral dimensions (w1, w2), and the mirror element inclination angle (α). By adjusting these parameters within specific ranges, the design achieves both compact overall dimensions and wide field of view capability, transforming the trade-off into a parameter optimization problem
2Adaptability or versatility
If the cavity is made deeper to allow wider light beam reflection angles, then the field of view increases, but the device thickness increases
Solution Approach 1:
The patent establishes specific parameter relationships and optimization ranges: cavity depth d within 5-20 μm, lateral dimensions w1 and w2 within 10-30 μm, and mirror inclination angle α between 40°-50°. These parameter specifications enable wide field of view (±45° or greater) while maintaining thin overall device profile, resolving the contradiction through precise parameter control
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures an extensive field of view of approximately 80° to 100° without clipping or shadowing, maintaining high optical performance and compact dimensions, suitable for portable devices like miniaturized projectors and 3D cameras.
Implementation Method 1
a mobile mass which carries a mirror element and is configured to be driven in rotation for reflecting an incident light beam with a desired angular range (FOV)
Data Source
AI summary
A mirror micromechanical structure has a mobile mass carrying a mirror element. The mass is drivable in rotation for reflecting an incident light beam with a desired angular range. The mobile mass is suspended above a cavity obtained in a supporting body. The cavity is shaped so that the supporting body does not hinder the reflected light beam within the desired angular range. In particular, the cavity extends as far as a first side edge wall of the supporting body of the mirror micromechanical structure. The cavity is open towards, and in communication with, the outside of the mirror micromechanical structure at the first side edge wall.