Mirror Node Process Verification for Inspection Accuracy
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Solution Overview
Problem
Existing integrated circuit inspection systems face challenges with flexibility, reliability, and cost due to reliance on customized hardware and switched fabric topologies, which are costly, inflexible, and lack standardization.
Innovation Solution
An inspection image processing system utilizing commercially available hardware connected via an image data broadcast network and an analytical network, allowing for the integration and testing of new computers without disrupting ongoing inspections, and enabling comparison with existing nodes to ensure accuracy and reliability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If customized hardware is used for inspection systems, then measurement precision and speed can be optimized, but device complexity and cost increase significantly
Solution Approach 1:
The patent creates a mirror node that is a copy of the primary inspection node, allowing the system to use standard commercial hardware while maintaining inspection capabilities through software-based image processing and analysis. The mirror node receives the same image data and performs identical processing, enabling verification without requiring specialized custom hardware.
2Productivity
If customized hardware is used for inspection systems, then inspection speed can be improved, but reliability decreases due to limited engineering support
Solution Approach 1:
The patent employs standard commercial computer hardware that can perform multiple functions including image acquisition, processing, analysis, and verification across different inspection nodes. This universal hardware approach improves reliability through vendor support and standardization while maintaining inspection speed through optimized software processing pipelines.
3Loss of information
If switched fabric topology is used for system architecture, then data transmission can be managed, but system cost and complexity increase
Solution Approach 1:
The patent introduces a mirror node as an intermediary that receives image data from the primary inspection node and performs independent processing. This intermediary approach ensures data transmission integrity by creating redundant processing paths while using standard network infrastructure rather than complex switched fabric topology.
4Ease of manufacture
If commercial hardware is used instead of customized hardware, then cost and flexibility improve, but measurement precision and reliability may be compromised
Solution Approach 1:
The patent implements a feedback mechanism where the mirror node's processing results are compared with the primary node's results. This feedback loop verifies the accuracy of commercial hardware processing by continuously monitoring and comparing outputs, ensuring that cost-effective commercial components maintain the precision required for semiconductor inspection.
Data Source
AI summary
An inspection image analysis system. At least one image processing computer is configured to receive and analyze at least one portion of an image. At least one test computer is configured to receive at least one common portion of the image also received by the at least one image processing computer, and to analyze the at least one common portion, using equivalent image processes as the corresponding at least one image processing computer. A job manager is configured to assign the common portion and to configure the corresponding image processing computer and the test computer to run equivalent image processes.