Mirror Coating on Peltier Element for Heat Dissipation
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Solution Overview
Problem
Existing mirrors for guiding radiation bundles in microlithography face challenges in heat dissipation, particularly with heat-sensitive multilayer coatings, where heat accumulation occurs, affecting the reflective surface's performance.
Innovation Solution
The implementation of a Peltier element with a reflectivity-increasing coating that directly dissipates heat, combined with a heat reservoir and a temperature control system using micro-Peltier elements for efficient heat management and real-time temperature regulation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If a reflectivity-increasing coating is applied to the mirror surface, then the mirror's reflectivity is improved, but heat accumulates in the coating and basic body
Solution Approach 1:
The patent extracts the heat dissipation function from the basic body by directly applying the coating to the Peltier element surface, separating the optical function (coating) from the thermal management function (Peltier element), thereby solving the heat accumulation problem while maintaining high reflectivity
Solution Approach 2:
The Peltier element acts as an intermediary between the coating and the heat reservoir, enabling direct heat transfer from the coating to the heat reservoir through the Peltier element's thermoelectric cooling capability, thus preventing heat accumulation in the basic body
2Temperature
If a multistage Peltier element is used to increase heat dissipating capacity, then heat dissipation is improved, but device complexity increases
Solution Approach 1:
The patent segments the Peltier element into multiple stages, with each stage handling a portion of the heat dissipation load, thereby increasing overall heat dissipating capacity while maintaining a modular and manageable structure
Solution Approach 2:
The multistage Peltier element serves multiple functions simultaneously: it provides the substrate for the reflectivity-increasing coating, acts as an active heat dissipation device, and functions as a temperature control element, thereby reducing the need for separate components
3Temperature
If heat is dissipated directly from the coating via the Peltier element, then heat accumulation in the basic body is reduced, but the coating must be in direct contact with the Peltier element
Solution Approach 1:
The patent merges the coating application process with the Peltier element manufacturing, directly applying the reflectivity-increasing coating onto the Peltier element surface during or after its fabrication, thereby eliminating the need for separate mounting structures and reducing overall device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively reduces heat accumulation in the mirror's body, maintaining the reflective surface's temperature within predefined limits, enhancing the mirror's performance and extending its operational capabilities.
Implementation Method 1
directly applying the reflectivity-increasing coating on the Peltier element has the effect that heat deposited in the coating can be dissipated from the reflective surface of the mirror directly via the Peltier element
Data Source
AI summary
A mirror serves for guiding a radiation bundle. The mirror has a basic body and a coating of a reflective surface of the basic body, the coating increasing the reflectivity of the mirror. A heat dissipating device serves for dissipating heat deposited in the coating. The heat dissipating device has at least one Peltier element. The coating is applied directly on the Peltier element. A temperature setting apparatus has at least one temperature sensor for a temperature of the reflective surface. A regulating device of the Temperature setting apparatus can be connected to the at least one Peltier element and is signal-connected to the at least one temperature sensor. The result is a mirror in which a heat dissipating capacity of the heat dissipating device is improved.